Nobuhiro TAKAHASHI

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method and etching apparatus
- Patent number 12,142,495
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Toshiki Kanaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,054,824
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Nobuhiro Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method and substrate processing system
- Patent number 11,784,054
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and apparatus
- Patent number 11,594,417
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Kazuhito Miyata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 11,581,192
- Issue date Feb 14, 2023
- Tokyo Electron Limited
- Takehiko Orii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for etching substrate
- Patent number 11,424,128
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Yuji Asakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method and apparatus
- Patent number 11,373,874
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and storage medium
- Patent number 11,342,192
- Issue date May 24, 2022
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 11,011,383
- Issue date May 18, 2021
- Tokyo Electron Limited
- Yasuo Asada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and method for manufacturing DRAM capacitor
- Patent number 10,854,463
- Issue date Dec 1, 2020
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 10,665,470
- Issue date May 26, 2020
- Tokyo Electron Limited
- Yasuo Asada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 10,312,079
- Issue date Jun 4, 2019
- Tokyo Electron Limited
- Koji Takeya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle collecting apparatus and particle collecting method
- Patent number 10,213,076
- Issue date Feb 26, 2019
- Tokyo Electron Limited
- Nobuhiro Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Etching method
- Patent number 9,691,630
- Issue date Jun 27, 2017
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and storage medium
- Patent number 9,607,855
- Issue date Mar 28, 2017
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming silicon film
- Patent number 9,318,328
- Issue date Apr 19, 2016
- Tokyo Electron Limited
- Katsuhiko Komori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Examination method and examination assistant device for quartz prod...
- Patent number 8,021,623
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Masayuki Oikawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND ETCHING DEVICE
- Publication number 20230223270
- Publication date Jul 13, 2023
- TOKYO ELECTRON LIMITED
- Takehiko ORII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230124597
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20220399204
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220380892
- Publication date Dec 1, 2022
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20220262655
- Publication date Aug 18, 2022
- TOKYO ELECTRON LIMITED
- Toshiki KANAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, METHOD OF REMOVING ETCHING RESIDUE, AND STORAGE MEDIUM
- Publication number 20210358761
- Publication date Nov 18, 2021
- Tokyo Electron Limited
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20210305056
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Takehiko ORII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210217651
- Publication date Jul 15, 2021
- TOKYO ELECTRON LIMITED
- Junnosuke TAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method And Substrate Processing System
- Publication number 20210082710
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND APPARATUS
- Publication number 20200395219
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Kazuhito MIYATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR ETCHING SUBSTRATE
- Publication number 20200312668
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Yuji ASAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND APPARATUS
- Publication number 20200312669
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method and Etching Apparatus
- Publication number 20200234974
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20200105539
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method, Etching Apparatus, and Storage Medium
- Publication number 20200098575
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method
- Publication number 20190228981
- Publication date Jul 25, 2019
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method and Method for Manufacturing Dram Capacitor
- Publication number 20190206694
- Publication date Jul 4, 2019
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20190198349
- Publication date Jun 27, 2019
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON-CONTAINING FILM ETCHING METHOD, COMPUTER-READABLE STORAGE M...
- Publication number 20190181056
- Publication date Jun 13, 2019
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD
- Publication number 20170309478
- Publication date Oct 26, 2017
- TOKYO ELECTRON LIMITED
- Koji TAKEYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD AND STORAGE MEDIUM
- Publication number 20160225637
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD
- Publication number 20160086814
- Publication date Mar 24, 2016
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND STORAGE MEDIUM
- Publication number 20150380268
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Satoshi TODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON FILM
- Publication number 20130323915
- Publication date Dec 5, 2013
- TOKYO ELECTRON LIMITED
- Katsuhiko KOMORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROTECTING COMPONENT OF FILM FORMING APPARATUS AND FILM F...
- Publication number 20130251896
- Publication date Sep 26, 2013
- TOKYO ELECTRON LIMITED
- Yamato TONEGAWA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PARTICLE COLLECTING APPARATUS AND PARTICLE COLLECTING METHOD
- Publication number 20130074281
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Application
EXPOSURE AND DEVELOPING METHOD
- Publication number 20080070167
- Publication date Mar 20, 2008
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Examination method and examination assistant device for quartz prod...
- Publication number 20070008638
- Publication date Jan 11, 2007
- TOKYO ELECTON LIMITED
- Masayuki Oikawa
- G01 - MEASURING TESTING

Nobuhiro TAKAHASHI

Person

Patents Grantslast 30 patents

Etching method and etching apparatus

Substrate processing method and substrate processing apparatus

Etching method and substrate processing system

Etching method and apparatus

Etching method and etching apparatus

Apparatus and method for etching substrate

Etching method and apparatus

Substrate processing method and storage medium

Etching method

Etching method and method for manufacturing DRAM capacitor

Etching method and etching apparatus

Etching method

Particle collecting apparatus and particle collecting method

Etching method

Etching method and storage medium

Method and apparatus for forming silicon film

Examination method and examination assistant device for quartz prod...

Patents Applicationslast 30 patents

ETCHING METHOD AND ETCHING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD, METHOD OF REMOVING ETCHING RESIDUE, AND STORAGE MEDIUM

ETCHING METHOD AND ETCHING APPARATUS

SUBSTRATE PROCESSING APPARATUS

Etching Method And Substrate Processing System

ETCHING METHOD AND APPARATUS

APPARATUS AND METHOD FOR ETCHING SUBSTRATE

ETCHING METHOD AND APPARATUS

Etching Method and Etching Apparatus

SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM

Etching Method, Etching Apparatus, and Storage Medium

Etching Method

Etching Method and Method for Manufacturing Dram Capacitor

ETCHING METHOD AND ETCHING APPARATUS

SILICON-CONTAINING FILM ETCHING METHOD, COMPUTER-READABLE STORAGE M...

ETCHING METHOD

ETCHING METHOD AND STORAGE MEDIUM

ETCHING METHOD

ETCHING METHOD AND STORAGE MEDIUM

METHOD AND APPARATUS FOR FORMING SILICON FILM

METHOD OF PROTECTING COMPONENT OF FILM FORMING APPARATUS AND FILM F...

PARTICLE COLLECTING APPARATUS AND PARTICLE COLLECTING METHOD

EXPOSURE AND DEVELOPING METHOD

Examination method and examination assistant device for quartz prod...