Nobuhiro Tokoro

Person

  • West Newbury, MA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Particle beam current monitoring technique

    • Patent number 6,541,780
    • Issue date Apr 1, 2003
    • Varian Semiconductor Equipment Associates, Inc.
    • Steven L. F. Richards
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Charge exchange cell

    • Patent number 5,838,012
    • Issue date Nov 17, 1998
    • Genus, Inc.
    • Marvin LaFontaine
    • G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
  • Information Patent Grant

    Method of monitoring ion beam current in ion implantation apparatus...

    • Patent number 5,319,212
    • Issue date Jun 7, 1994
    • Genus, Inc.
    • Nobuhiro Tokoro
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion accelerator

    • Patent number 5,300,891
    • Issue date Apr 5, 1994
    • Genus, Inc.
    • Nobuhiro Tokoro
    • G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
  • Information Patent Grant

    Ion source

    • Patent number 5,162,699
    • Issue date Nov 10, 1992
    • Genus, Inc.
    • Nobuhiro Tokoro
    • H01 - BASIC ELECTRIC ELEMENTS