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Nobuhisa MAKINO
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Toyama-shi, JP
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last 30 patents
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Patent Grant
Management apparatus, substrate processing system and non-transitor...
Patent number
10,289,781
Issue date
May 14, 2019
Kokusai Electric Corporation
Toshiro Koshimaki
G06 - COMPUTING CALCULATING COUNTING
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last 30 patents
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Patent Application
MANAGEMENT APPARATUS, SUBSTRATE PROCESSING SYSTEM AND NON-TRANSITOR...
Publication number
20160078163
Publication date
Mar 17, 2016
Hitachi Kokusai Electric Inc.
Toshiro KOSHIMAKI
G06 - COMPUTING CALCULATING COUNTING