Nobukazu Ishizaka

Person

Kikuchi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 7,179,504
- Issue date Feb 20, 2007
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 7,087,118
- Issue date Aug 8, 2006
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 6,936,107
- Issue date Aug 30, 2005
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming unit
- Patent number 6,872,256
- Issue date Mar 29, 2005
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 6,824,616
- Issue date Nov 30, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing unit
- Patent number 6,773,510
- Issue date Aug 10, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus and coating film forming method
- Patent number 6,716,478
- Issue date Apr 6, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus and coating unit
- Patent number 6,676,757
- Issue date Jan 13, 2004
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming unit
- Patent number 6,616,760
- Issue date Sep 9, 2003
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus
- Patent number 6,605,153
- Issue date Aug 12, 2003
- Tokyo Electron Limited
- Takahiro Kitano
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming unit
- Patent number 6,514,344
- Issue date Feb 4, 2003
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus
- Patent number 6,391,111
- Issue date May 21, 2002
- Tokyo Electron Limited
- Akihiro Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus and coating film forming method
- Patent number 6,383,948
- Issue date May 7, 2002
- Tokyo Electron Limited
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for supplying a process solution
- Patent number 6,193,783
- Issue date Feb 27, 2001
- Tokyo Electron Limited
- Kazuo Sakamoto
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method of cleaning a substrate by scrubbing
- Patent number 5,882,426
- Issue date Mar 16, 1999
- Tokyo Electron Limited
- Akira Yonemizu
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus and cleaning method
- Patent number 5,636,401
- Issue date Jun 10, 1997
- Tokyo Electron Limited
- Akira Yonemizu
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Coating film forming apparatus and coating unit
- Publication number 20050155550
- Publication date Jul 21, 2005
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing method and substrate processing system
- Publication number 20050100679
- Publication date May 12, 2005
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Coating film forming apparatus and coating unit
- Publication number 20040134425
- Publication date Jul 15, 2004
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Film forming unit
- Publication number 20040094089
- Publication date May 20, 2004
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing unit
- Publication number 20020148566
- Publication date Oct 17, 2002
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing system
- Publication number 20020150691
- Publication date Oct 17, 2002
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming unit
- Publication number 20020124798
- Publication date Sep 12, 2002
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming apparatus and coating film forming method
- Publication number 20020088393
- Publication date Jul 11, 2002
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming apparatus
- Publication number 20010003967
- Publication date Jun 21, 2001
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming apparatus
- Publication number 20010003966
- Publication date Jun 21, 2001
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film forming unit
- Publication number 20010003968
- Publication date Jun 21, 2001
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating film forming apparatus and coating unit
- Publication number 20010003964
- Publication date Jun 21, 2001
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS

Nobukazu Ishizaka

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing system

Coating film forming apparatus and coating unit

Coating film forming apparatus and coating unit

Film forming unit

Substrate processing method and substrate processing system

Substrate processing unit

Coating film forming apparatus and coating film forming method

Coating film forming apparatus and coating unit

Film forming unit

Coating film forming apparatus

Film forming unit

Coating apparatus

Coating film forming apparatus and coating film forming method

Apparatus and method for supplying a process solution

Method of cleaning a substrate by scrubbing

Cleaning apparatus and cleaning method

Patents Applicationslast 30 patents

Coating film forming apparatus and coating unit

Substrate processing method and substrate processing system

Coating film forming apparatus and coating unit

Film forming unit

Substrate processing unit

Substrate processing method and substrate processing system

Film forming unit

Coating film forming apparatus and coating film forming method

Coating film forming apparatus

Film forming apparatus

Film forming unit

Coating film forming apparatus and coating unit