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Scanning probe apparatus
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Patent number 8,035,089
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Issue date Oct 11, 2011
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Canon Kabushiki Kaisha
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Takao Kusaka
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B82 - NANO-TECHNOLOGY
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Scanning probe apparatus
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Patent number 7,765,606
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Issue date Jul 27, 2010
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Canon Kabushiki Kaisha
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Takao Kusaka
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G01 - MEASURING TESTING
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Scanning probe apparatus
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Patent number 7,690,047
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Issue date Mar 30, 2010
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Canon Kabushiki Kaisha
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Susumu Yasuda
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G01 - MEASURING TESTING
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Scanning probe apparatus
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Patent number 7,569,817
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Issue date Aug 4, 2009
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Canon Kabushiki Kaisha
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Takao Kusaka
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G01 - MEASURING TESTING