Nobuo Arai

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Gunma, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heating apparatus with electrostatic attraction function
- Patent number 6,917,021
- Issue date Jul 12, 2005
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ceramic electrostatic chuck with built-in heater
- Patent number 5,665,260
- Issue date Sep 9, 1997
- Shin-Etsu Chemical Co., Ltd.
- Nobuo Kawada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Heating apparatus with electrostatic attraction function
- Publication number 20030234248
- Publication date Dec 25, 2003
- Shin-Etsu Chemical Co., Ltd.
- Shoji Kano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR