Nobuo Imaoka

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Measurement apparatus, exposure apparatus, and device fabrication m...
- Patent number 8,928,882
- Issue date Jan 6, 2015
- Canon Kabushiki Kaisha
- Nobuo Imaoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment unit and exposure apparatus
- Patent number 8,149,385
- Issue date Apr 3, 2012
- Canon Kabushiki Kaisha
- Nobuo Imaoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IRRADIATION APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURI...
- Publication number 20140106268
- Publication date Apr 17, 2014
- Canon Kabushiki Kaisha
- Nobuo Imaoka
- B82 - NANO-TECHNOLOGY
Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION M...
- Publication number 20120258391
- Publication date Oct 11, 2012
- Canon Kabushiki Kaisha
- Nobuo Imaoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRON GUN, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICL...
- Publication number 20110294071
- Publication date Dec 1, 2011
- Canon Kabushiki Kaisha
- Nobuo Imaoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALIGNMENT UNIT AND EXPOSURE APPARATUS
- Publication number 20100073656
- Publication date Mar 25, 2010
- Canon Kabushiki Kaisha
- Nobuo Imaoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY