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Nobuo Ishimaru

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Patents Grantslast 30 patents

  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 9,373,499
    • Issue date Jun 21, 2016
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 9,039,912
    • Issue date May 26, 2015
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,875,656
    • Issue date Nov 4, 2014
    • Hitachi Kokusai Electric Inc.
    • Tadashi Kontani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 8,544,411
    • Issue date Oct 1, 2013
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,518,182
    • Issue date Aug 27, 2013
    • Hitachi Kokusai Electric Inc.
    • Shizue Ogawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,453,600
    • Issue date Jun 4, 2013
    • Hitachi Kokusai Electric Inc.
    • Tomoyasu Miyashita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,297,224
    • Issue date Oct 30, 2012
    • Hitachi Kokusai Electric Inc.
    • Nobuo Ishimaru
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and reaction container
    • Patent number 8,261,692
    • Issue date Sep 11, 2012
    • Hitachi Kokusai Electric Inc.
    • Tadashi Kontani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and semiconductor device producing m...
    • Patent number 8,251,012
    • Issue date Aug 28, 2012
    • Hitachi Kokusai Electric Inc.
    • Nobuo Ishimaru
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,092,603
    • Issue date Jan 10, 2012
    • Hitachi Kokusai Electric Inc.
    • Hironobu Shimizu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and method of manufacturing semicond...
    • Patent number 8,093,072
    • Issue date Jan 10, 2012
    • Hitachi Kokusai Electric, Inc.
    • Nobuo Ishimaru
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and reaction container
    • Patent number 8,047,158
    • Issue date Nov 1, 2011
    • Hitachi Kokusai Electric Inc.
    • Tadashi Kontani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 8,028,652
    • Issue date Oct 4, 2011
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 8,020,514
    • Issue date Sep 20, 2011
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 7,958,842
    • Issue date Jun 14, 2011
    • Hitachi Kokusai Electric Inc.
    • Shizue Ogawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and reaction container
    • Patent number 7,900,580
    • Issue date Mar 8, 2011
    • Hitachi Kokusai Electric Inc.
    • Tadashi Kontani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Batch-type remote plasma processing apparatus
    • Patent number 7,861,668
    • Issue date Jan 4, 2011
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and substrate processing method
    • Patent number 7,767,053
    • Issue date Aug 3, 2010
    • Hitachi Kokusai Electric Inc.
    • Tomohiko Takeda
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
    • Publication number 20210090861
    • Publication date Mar 25, 2021
    • Kokusai Electric Corporation
    • Nobuo ISHIMARU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    BATCH-TYPE REMOTE PLASMA PROCESSING APPARATUS
    • Publication number 20150228476
    • Publication date Aug 13, 2015
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Batch-Type Remote Plasma Processing Apparatus
    • Publication number 20130104804
    • Publication date May 2, 2013
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki TOYODA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Batch-Type Remote Plasma Processing Apparatus
    • Publication number 20130072002
    • Publication date Mar 21, 2013
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki TOYODA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20110209664
    • Publication date Sep 1, 2011
    • Shizue Ogawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND PRODUCING METHOD OF DEVICE
    • Publication number 20100323507
    • Publication date Dec 23, 2010
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki TOYODA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND REACTION CONTAINER
    • Publication number 20100263593
    • Publication date Oct 21, 2010
    • Tadashi Kontani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND PRODUCING METHOD OF DEVICE
    • Publication number 20100258530
    • Publication date Oct 14, 2010
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki TOYODA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
    • Publication number 20100130009
    • Publication date May 27, 2010
    • Hitachi Kokusai Electric Inc.
    • Nobuo ISHIMARU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus
    • Publication number 20090241835
    • Publication date Oct 1, 2009
    • Hitachi Kokusai Electric Inc.
    • Tadashi Kontani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20090197425
    • Publication date Aug 6, 2009
    • Hitachi Kokusai Electric Inc.
    • Nobuo ISHIMARU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus
    • Publication number 20090178762
    • Publication date Jul 16, 2009
    • Hitachi Kokusai Electric Inc.
    • Hironobu Shimizu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus
    • Publication number 20090178619
    • Publication date Jul 16, 2009
    • Hitachi Kokusai Electric Inc.
    • Hironobu Shimizu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Batch-Type Remote Plasma Processing Apparatus
    • Publication number 20090159440
    • Publication date Jun 25, 2009
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Batch-Type Remote Plasma Processing Apparatus
    • Publication number 20090133630
    • Publication date May 28, 2009
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus
    • Publication number 20090071405
    • Publication date Mar 19, 2009
    • Hitachi Kokusan Electric Inc.
    • Tomoyasu Miyashita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus and Semiconductor Device Producing M...
    • Publication number 20080286980
    • Publication date Nov 20, 2008
    • Hitachi Kokusai Electric Inc.
    • Nobuo Ishimaru
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus and Reaction Container
    • Publication number 20080251015
    • Publication date Oct 16, 2008
    • Tadashi Kontani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus and Reaction Container
    • Publication number 20080251014
    • Publication date Oct 16, 2008
    • Tadashi Kontani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus
    • Publication number 20080153308
    • Publication date Jun 26, 2008
    • Hitachi Kokusai Electric Inc.
    • Shizue Ogawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus and Reaction Container
    • Publication number 20080121180
    • Publication date May 29, 2008
    • Tadashi Kontani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Batch-Type Remote Plasma Processing Apparatus
    • Publication number 20080093215
    • Publication date Apr 24, 2008
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus and substrate processing method
    • Publication number 20080075640
    • Publication date Mar 27, 2008
    • Hitachi Kokusai Electric Inc.
    • Tomohiko Takeda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Batch-Type Remote Plasma Processing Apparatus
    • Publication number 20080066681
    • Publication date Mar 20, 2008
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Batch-Type Remote Plasma Processing Apparatus
    • Publication number 20080060580
    • Publication date Mar 13, 2008
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus
    • Publication number 20080023141
    • Publication date Jan 31, 2008
    • Hitachi Kokusai Electric Inc.
    • Hironobu Shimizu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Batch-Type Remote Plasma Processing Apparatus
    • Publication number 20070246355
    • Publication date Oct 25, 2007
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing and method of manufacturing device
    • Publication number 20060260544
    • Publication date Nov 23, 2006
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus and reaction container
    • Publication number 20040025786
    • Publication date Feb 12, 2004
    • Tadashi Kontani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Batch-type remote plasma processing apparatus
    • Publication number 20030164143
    • Publication date Sep 4, 2003
    • Hitachi Kokusai Electric Inc.
    • Kazuyuki Toyoda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...