Nobuo Kawase

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Processing fluid supply device, substrate processing device, proces...
- Patent number 10,761,422
- Issue date Sep 1, 2020
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Processing fluid supply device, substrate processing device, proces...
- Patent number 10,133,173
- Issue date Nov 20, 2018
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING FLUID SUPPLY DEVICE, SUBSTRATE PROCESSING DEVICE, PROCES...
- Publication number 20180292746
- Publication date Oct 11, 2018
- SCREEN Holdings Co., Ltd.
- Masahiro MIYAGI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING FLUID SUPPLY DEVICE, SUBSTRATE PROCESSING DEVICE, PROCES...
- Publication number 20150264790
- Publication date Sep 17, 2015
- SCREEN Holdings Co., Ltd.
- Masahiro Miyagi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR