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Chemical vapor deposition apparatus
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Patent number 5,803,974
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Issue date Sep 8, 1998
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Canon Kabushiki Kaisha
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Nobuo Mikoshiba
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Process for forming deposited film
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Patent number 5,753,320
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Issue date May 19, 1998
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Canon Kabushiki Kaisha
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Nobuo Mikoshiba
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vapor depositing method
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Patent number 5,705,224
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Issue date Jan 6, 1998
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Kokusai Electric Co., Ltd.
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Junichi Murota
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C30 - CRYSTAL GROWTH
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Semiconductor element
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Patent number 5,262,673
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Issue date Nov 16, 1993
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Nobuo Mikoshiba
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F28 - HEAT EXCHANGE IN GENERAL
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Integrated circuit
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Patent number 5,245,207
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Issue date Sep 14, 1993
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Nobuo Mikoshiba
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma CVD of aluminum films
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Patent number 5,091,210
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Issue date Feb 25, 1992
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Canon Kabushiki Kaisha
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Nobuo Mikoshiba
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film forming apparatus
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Patent number 4,989,541
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Issue date Feb 5, 1991
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Nobuo Mikoshiba
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Crystal defects analyzer
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Patent number 4,448,525
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Issue date May 15, 1984
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Semiconductor Research Foundation
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Nobuo Mikoshiba
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G01 - MEASURING TESTING