Nobuo MIYAMOTO

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for controlling operation of electron emission source, elect...
- Patent number 11,562,878
- Issue date Jan 24, 2023
- NuFlare Technology, Inc.
- Nobuo Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam apparatus, charged-particle beam writing appa...
- Patent number 10,998,162
- Issue date May 4, 2021
- NuFlare Technology, Inc.
- Nobuo Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning electron source and electron beam writing apparatus
- Patent number 10,134,559
- Issue date Nov 20, 2018
- NuFlare Technology, Inc.
- Nobuo Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun supporting member and electron gun apparatus
- Patent number 9,601,298
- Issue date Mar 21, 2017
- NuFlare Technology, Inc.
- Nobuo Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode operating temperature adjusting method, and writing apparatus
- Patent number 9,082,586
- Issue date Jul 14, 2015
- NuFlare Technology, Inc.
- Nobuo Miyamoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processing method and processing device of conditioning electron gun
- Patent number 7,683,551
- Issue date Mar 23, 2010
- Nuflare Technology, Inc.
- Nobuo Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ESTIMATING CATHODE LIFETIME OF ELECTRON GUN, AND ELECTRO...
- Publication number 20230154720
- Publication date May 18, 2023
- NuFlare Technology, Inc.
- Nobuo MIYAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONTROLLING OPERATION OF ELECTRON EMISSION SOURCE, ELECT...
- Publication number 20220157553
- Publication date May 19, 2022
- NuFlare Technology, Inc.
- Nobuo MIYAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM APPARATUS, CHARGED-PARTICLE BEAM WRITING APPA...
- Publication number 20190080879
- Publication date Mar 14, 2019
- NuFlare Technology, Inc.
- Nobuo MIYAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING ELECTRON SOURCE AND ELECTRON BEAM WRITING APPARATUS
- Publication number 20170032926
- Publication date Feb 2, 2017
- NuFlare Technology, Inc.
- Nobuo MIYAMOTO
- B08 - CLEANING
Information Patent Application
ELECTRON GUN SUPPORTING MEMBER AND ELECTRON GUN APPARATUS
- Publication number 20160064174
- Publication date Mar 3, 2016
- NuFlare Technology, Inc.
- Nobuo MIYAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODE OPERATING TEMPERATURE ADJUSTING METHOD, AND WRITING APPARATUS
- Publication number 20140239200
- Publication date Aug 28, 2014
- NuFlare Technology, Inc.
- Nobuo MIYAMOTO
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROCESSING METHOD AND PROCESSING DEVICE OF CONDITIONING ELECTRON GUN
- Publication number 20080153376
- Publication date Jun 26, 2008
- NuFlare Technology, Inc.
- Nobuo MIYAMOTO
- B82 - NANO-TECHNOLOGY

Nobuo MIYAMOTO

Person

Patents Grantslast 30 patents

Method for controlling operation of electron emission source, elect...

Charged-particle beam apparatus, charged-particle beam writing appa...

Method of cleaning electron source and electron beam writing apparatus

Electron gun supporting member and electron gun apparatus

Cathode operating temperature adjusting method, and writing apparatus

Processing method and processing device of conditioning electron gun

Patents Applicationslast 30 patents

METHOD FOR ESTIMATING CATHODE LIFETIME OF ELECTRON GUN, AND ELECTRO...

METHOD FOR CONTROLLING OPERATION OF ELECTRON EMISSION SOURCE, ELECT...

CHARGED-PARTICLE BEAM APPARATUS, CHARGED-PARTICLE BEAM WRITING APPA...

METHOD OF CLEANING ELECTRON SOURCE AND ELECTRON BEAM WRITING APPARATUS

ELECTRON GUN SUPPORTING MEMBER AND ELECTRON GUN APPARATUS

CATHODE OPERATING TEMPERATURE ADJUSTING METHOD, AND WRITING APPARATUS

PROCESSING METHOD AND PROCESSING DEVICE OF CONDITIONING ELECTRON GUN