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Nobuo OKUMURA
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Amagasaki-shi, JP
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last 30 patents
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Patent Grant
Semiconductor device manufacturing method
Patent number
8,241,982
Issue date
Aug 14, 2012
Tokyo Electron Limited
Yoshihiro Hirota
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20110073931
Publication date
Mar 31, 2011
TOKYO ELECTRON LIMITED
Yoshihiro HIROTA
H01 - BASIC ELECTRIC ELEMENTS