Nobuo Shibata

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Kasumigaura, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus and sample elevating apparatus
- Patent number 10,153,128
- Issue date Dec 11, 2018
- Hitachi High-Technologies Corporation
- Masakazu Sugaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample positioning apparatus, sample stage, and charged particle be...
- Patent number 8,946,652
- Issue date Feb 3, 2015
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device
- Patent number 8,823,309
- Issue date Sep 2, 2014
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen stage apparatus and specimen stage positioning control method
- Patent number 8,076,651
- Issue date Dec 13, 2011
- Hitachi High-Technologies Corporation
- Masahiro Koyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND SAMPLE ELEVATING APPARATUS
- Publication number 20180138009
- Publication date May 17, 2018
- Hitachi High-Technologies Corporation
- Masakazu SUGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE POSITIONING APPARATUS, SAMPLE STAGE, AND CHARGED PARTICLE BE...
- Publication number 20140312246
- Publication date Oct 23, 2014
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
- Publication number 20140042338
- Publication date Feb 13, 2014
- Hitachi High-Technologies Corporation
- Nobuo Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Device
- Publication number 20120145920
- Publication date Jun 14, 2012
- Hitachi High-Technologies Corporation
- Hironori Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMEN STAGE APPARATUS AND SPECIMEN STAGE POSITIONING CONTROL METHOD
- Publication number 20090250625
- Publication date Oct 8, 2009
- Masahiro KOYAMA
- H01 - BASIC ELECTRIC ELEMENTS