Nobuo Tokai

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor-manufacturing apparatus
- Patent number 7,393,417
- Issue date Jul 1, 2008
- Applied Materials, Inc.
- Yuji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming silicon comprising films using hexachlorodisila...
- Patent number 6,884,464
- Issue date Apr 26, 2005
- Applied Materials, Inc.
- Lee Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for forming film, semiconductor device and fabric...
- Patent number 6,566,199
- Issue date May 20, 2003
- Applied Materials, Inc.
- Nobuo Tokai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Methods for forming silicon comprising films using hexachlorodisila...
- Publication number 20040086640
- Publication date May 6, 2004
- APPLIED MATERIALS, INC.
- Lee Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and system for forming film, semiconductor device and fabric...
- Publication number 20020014700
- Publication date Feb 7, 2002
- Nobuo Tokai
- H01 - BASIC ELECTRIC ELEMENTS