Nobuo Yamaguchi

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Sputtering apparatus and recording medium for recording control pro...
- Patent number 10,378,100
- Issue date Aug 13, 2019
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering apparatus
- Patent number 9,905,401
- Issue date Feb 27, 2018
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,779,921
- Issue date Oct 3, 2017
- Canon Anelva Corporation
- Yoshimitsu Shimane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and electronic device manufacturing method
- Patent number 9,593,412
- Issue date Mar 14, 2017
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic device manufacturing method and sputtering method
- Patent number 9,472,384
- Issue date Oct 18, 2016
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and method of manufacturing electronic device
- Patent number 9,322,092
- Issue date Apr 26, 2016
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic device manufacturing method and sputtering method
- Patent number 9,090,974
- Issue date Jul 28, 2015
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding apparatus, mask alignment method, and vacuum proc...
- Patent number 9,082,803
- Issue date Jul 14, 2015
- Canon Anelva Corporation
- Yoshimitu Shimane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering apparatus
- Patent number 9,034,152
- Issue date May 19, 2015
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering method and sputtering apparatus
- Patent number 8,992,743
- Issue date Mar 31, 2015
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 8,669,624
- Issue date Mar 11, 2014
- Canon Anelva Corporation
- Naomu Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition apparatus and electronic device manufacturing method
- Patent number 8,663,437
- Issue date Mar 4, 2014
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 8,147,664
- Issue date Apr 3, 2012
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering film forming method, electronic device manufacturing met...
- Patent number 7,857,946
- Issue date Dec 28, 2010
- Canon Anelva Corporation
- Naomu Kitano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic attraction mechanism, surface processing method and s...
- Patent number 6,922,325
- Issue date Jul 26, 2005
- Anelva Corporation
- Nobuo Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRONIC DEVICE MANUFACTURING METHOD AND SPUTTERING METHOD
- Publication number 20150364301
- Publication date Dec 17, 2015
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150294845
- Publication date Oct 15, 2015
- Canon ANELVA Corporation
- Yoshimitsu SHIMANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTIVE SPUTTERING APPARATUS
- Publication number 20150206714
- Publication date Jul 23, 2015
- Canon ANELVA Corporation
- NOBUO YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PRO...
- Publication number 20150101927
- Publication date Apr 16, 2015
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20140054164
- Publication date Feb 27, 2014
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20130285158
- Publication date Oct 31, 2013
- Canon ANELVA Corporation
- Naomu Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC DEVICE MANUFACTURING METHOD AND SPUTTERING METHOD
- Publication number 20130048489
- Publication date Feb 28, 2013
- Canon ANELVA Corporation
- Nobuo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
- Publication number 20120325651
- Publication date Dec 27, 2012
- Canon ANELVA Corporation
- Nobuo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING METHOD AND SPUTTERING APPARATUS
- Publication number 20120234672
- Publication date Sep 20, 2012
- Canon ANELVA Corporation
- Nobuo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
- Publication number 20120164354
- Publication date Jun 28, 2012
- Canon ANELVA Corporation
- Yuichi Otani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE SPUTTERING APPARATUS
- Publication number 20120152736
- Publication date Jun 21, 2012
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Holding Apparatus, Mask Alignment Method, and Vacuum Proc...
- Publication number 20110051115
- Publication date Mar 3, 2011
- Canon ANELVA Corporation
- Yoshimitu Shimane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PRO...
- Publication number 20110042209
- Publication date Feb 24, 2011
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS
- Publication number 20100326818
- Publication date Dec 30, 2010
- Canon ANELVA Corporation
- Manabu Ikemoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20100243438
- Publication date Sep 30, 2010
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20100224482
- Publication date Sep 9, 2010
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING FILM FORMING METHOD, ELECTRONIC DEVICE MANUFACTURING MET...
- Publication number 20080264775
- Publication date Oct 30, 2008
- Canon ANELVA Corporation
- Naomu Kitano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic attraction mechanism, surface processing method and s...
- Publication number 20020017694
- Publication date Feb 14, 2002
- Nobuo Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Nobuo Yamaguchi

Person

Patents Grantslast 30 patents

Sputtering apparatus and recording medium for recording control pro...

Reactive sputtering apparatus

Substrate processing apparatus

Deposition apparatus and electronic device manufacturing method

Electronic device manufacturing method and sputtering method

Sputtering apparatus and method of manufacturing electronic device

Electronic device manufacturing method and sputtering method

Substrate holding apparatus, mask alignment method, and vacuum proc...

Reactive sputtering apparatus

Sputtering method and sputtering apparatus

Semiconductor device and manufacturing method thereof

Deposition apparatus and electronic device manufacturing method

Sputtering apparatus

Sputtering film forming method, electronic device manufacturing met...

Electrostatic attraction mechanism, surface processing method and s...

Patents Applicationslast 30 patents

ELECTRONIC DEVICE MANUFACTURING METHOD AND SPUTTERING METHOD

SUBSTRATE PROCESSING APPARATUS

REACTIVE SPUTTERING APPARATUS

SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PRO...

DEPOSITION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

ELECTRONIC DEVICE MANUFACTURING METHOD AND SPUTTERING METHOD

SPUTTERING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

SPUTTERING METHOD AND SPUTTERING APPARATUS

SPUTTERING APPARATUS AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

REACTIVE SPUTTERING APPARATUS

Substrate Holding Apparatus, Mask Alignment Method, and Vacuum Proc...

SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PRO...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS

SPUTTERING APPARATUS

DEPOSITION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

SPUTTERING FILM FORMING METHOD, ELECTRONIC DEVICE MANUFACTURING MET...

Electrostatic attraction mechanism, surface processing method and s...