Noburu Shimizu

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing end point detection method, polishing method, and polish...
- Patent number 10,207,390
- Issue date Feb 19, 2019
- TOSHIBA MEMORY CORPORATION
- Noburu Shimizu
- B24 - GRINDING POLISHING
Information Patent Grant
Processing end point detection method, polishing method, and polish...
- Patent number 8,554,356
- Issue date Oct 8, 2013
- Ebara Corporation
- Noburu Shimizu
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,398,811
- Issue date Mar 19, 2013
- Ebara Corporation
- Tatsuya Sasaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method of making diagram for use in selection of wavelength of ligh...
- Patent number 8,388,408
- Issue date Mar 5, 2013
- Ebara Corporation
- Yoichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing end point detection method
- Patent number 8,157,616
- Issue date Apr 17, 2012
- Ebara Corporation
- Noburu Shimizu
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,025,759
- Issue date Sep 27, 2011
- Ebara Corporation
- Tatsuya Sasaki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method
- Patent number 7,960,188
- Issue date Jun 14, 2011
- Ebara Corporation
- Shinrou Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 7,780,503
- Issue date Aug 24, 2010
- Ebara Corporation
- Shinrou Ohta
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing workpiece
- Patent number 7,011,569
- Issue date Mar 14, 2006
- Ebara Corporation
- Noburu Shimizu
- B24 - GRINDING POLISHING
Information Patent Grant
Method for polishing workpieces using fixed abrasives
- Patent number 6,595,831
- Issue date Jul 22, 2003
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing workpiece
- Patent number 6,413,156
- Issue date Jul 2, 2002
- Ebara Corporation
- Noburu Shimizu
- B08 - CLEANING
Information Patent Grant
Method and apparatus for polishing workpiece
- Patent number 6,343,978
- Issue date Feb 5, 2002
- Ebara Corporation
- Noburu Shimizu
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus
- Patent number 6,148,463
- Issue date Nov 21, 2000
- Ebara Corporation
- Noburu Shimizu
- B08 - CLEANING
Information Patent Grant
Method for polishing workpieces and apparatus therefor
- Patent number 5,989,107
- Issue date Nov 23, 1999
- Ebara Corporation
- Noburu Shimizu
- B24 - GRINDING POLISHING
Information Patent Grant
Conditioner for a polishing tool
- Patent number 5,954,570
- Issue date Sep 21, 1999
- Kabushiki Kaisha Toshiba
- Hiroyuki Yano
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 5,827,115
- Issue date Oct 27, 1998
- Ebara Corporation
- Noburu Shimizu
- B24 - GRINDING POLISHING
Information Patent Grant
Revolving drum polishing apparatus
- Patent number 5,643,056
- Issue date Jul 1, 1997
- Ebara Corporation
- Masayoshi Hirose
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING END POINT DETECTION METHOD, POLISHING METHOD, AND POLISH...
- Publication number 20140004773
- Publication date Jan 2, 2014
- Kabushiki Kaisha Toshiba
- Noburu SHIMIZU
- G01 - MEASURING TESTING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20110306274
- Publication date Dec 15, 2011
- Tatsuya Sasaki
- B24 - GRINDING POLISHING
Information Patent Application
Method of making diagram for use in selection of wavelength of ligh...
- Publication number 20100093260
- Publication date Apr 15, 2010
- EBARA CORPORATION
- Yoichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
Processing end point detection method, polishing method,and polishi...
- Publication number 20100015889
- Publication date Jan 21, 2010
- Noburu Shimizu
- G05 - CONTROLLING REGULATING
Information Patent Application
POLISHING END POINT DETECTION METHOD
- Publication number 20090298387
- Publication date Dec 3, 2009
- Noburu SHIMIZU
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD
- Publication number 20090286332
- Publication date Nov 19, 2009
- Shinrou OHTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20090130956
- Publication date May 21, 2009
- EBARA CORPORATION
- Shinrou Ohta
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method and polishing apparatus
- Publication number 20070243797
- Publication date Oct 18, 2007
- Akira Fukunaga
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20060166503
- Publication date Jul 27, 2006
- Tatsuya Sasaki
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for polishing workpiece
- Publication number 20050090188
- Publication date Apr 28, 2005
- Noburu Shimizu
- B08 - CLEANING
Information Patent Application
Method and apparatus for polishing workpiece
- Publication number 20020160696
- Publication date Oct 31, 2002
- Noburu Shimizu
- B24 - GRINDING POLISHING

Noburu Shimizu

Person

Patents Grantslast 30 patents

Processing end point detection method, polishing method, and polish...

Processing end point detection method, polishing method, and polish...

Polishing apparatus and polishing method

Method of making diagram for use in selection of wavelength of ligh...

Polishing end point detection method

Polishing apparatus and polishing method

Polishing method

Polishing apparatus and polishing method

Method and apparatus for polishing workpiece

Method for polishing workpieces using fixed abrasives

Method and apparatus for polishing workpiece

Method and apparatus for polishing workpiece

Cleaning apparatus

Method for polishing workpieces and apparatus therefor

Conditioner for a polishing tool

Polishing apparatus

Revolving drum polishing apparatus

Patents Applicationslast 30 patents

PROCESSING END POINT DETECTION METHOD, POLISHING METHOD, AND POLISH...

POLISHING APPARATUS AND POLISHING METHOD

Method of making diagram for use in selection of wavelength of ligh...

Processing end point detection method, polishing method,and polishi...

POLISHING END POINT DETECTION METHOD

POLISHING METHOD

Polishing apparatus and polishing method

Polishing method and polishing apparatus

Polishing apparatus and polishing method

Method and apparatus for polishing workpiece

Method and apparatus for polishing workpiece