-
Polishing apparatus
-
Patent number 6,183,342
-
Issue date Feb 6, 2001
-
Ebara Corporation
-
Katsuhide Watanabe
-
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
-
Polishing apparatus
-
Patent number 5,951,368
-
Issue date Sep 14, 1999
-
Ebara Corporation
-
Katsuhide Watanabe
-
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
-
Screw vacuum pump
-
Patent number 5,374,170
-
Issue date Dec 20, 1994
-
Ebara Corporation
-
Noburu Shimizu
-
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
-
-
Gas rotary machine
-
Patent number 4,688,989
-
Issue date Aug 25, 1987
-
Ebara Corporation
-
Hideki Kondo
-
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...