Noburu Takakura

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement apparatus that measures position information of measure...
- Patent number 12,148,181
- Issue date Nov 19, 2024
- Canon Kabushiki Kaisha
- Satoru Jimbo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Information processing apparatus, storage medium, lithography appar...
- Patent number 11,061,335
- Issue date Jul 13, 2021
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing pattern and article manufacturing method
- Patent number 10,754,257
- Issue date Aug 25, 2020
- Canon Kabushiki Kaisha
- Noburu Takakura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, and method of manufacturing article
- Patent number 10,372,033
- Issue date Aug 6, 2019
- Canon Kabushiki Kaisha
- Kenji Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, lithography method, lithography system, stor...
- Patent number 10,359,711
- Issue date Jul 23, 2019
- Canon Kabushiki Kaisha
- Yoshihito Tada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, lithography method, lithography system, stor...
- Patent number 9,880,475
- Issue date Jan 30, 2018
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, lithography method, lithography system, stor...
- Patent number 9,423,700
- Issue date Aug 23, 2016
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 8,305,555
- Issue date Nov 6, 2012
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aligning method
- Patent number 6,333,786
- Issue date Dec 25, 2001
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aligning method
- Patent number 6,097,495
- Issue date Aug 1, 2000
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aligning method utilizing reliability weighting coefficients
- Patent number 5,543,921
- Issue date Aug 6, 1996
- Canon Kabushiki Kaisha
- Shigeyuki Uzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT APPARATUS THAT MEASURES POSITION INFORMATION OF MEASURE...
- Publication number 20250029276
- Publication date Jan 23, 2025
- Canon Kabushiki Kaisha
- Satoru JIMBO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING APPARATUS, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS,...
- Publication number 20220130028
- Publication date Apr 28, 2022
- Canon Kabushiki Kaisha
- Satoru Jimbo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT APPARATUS THAT MEASURES POSITION INFORMATION OF MEASURE...
- Publication number 20220067958
- Publication date Mar 3, 2022
- Canon Kabushiki Kaisha
- Satoru Jimbo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF MANUFACTURING PATTERN AND ARTICLE MANUFACTURING METHOD
- Publication number 20200026202
- Publication date Jan 23, 2020
- Canon Kabushiki Kaisha
- Noburu Takakura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INFORMATION PROCESSING APPARATUS, STORAGE MEDIUM, LITHOGRAPHY APPAR...
- Publication number 20200004158
- Publication date Jan 2, 2020
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, LITHOGRAPHY SYSTEM, STOR...
- Publication number 20160334714
- Publication date Nov 17, 2016
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20160016353
- Publication date Jan 21, 2016
- Canon Kabushiki Kaisha
- Kenji Yamamoto
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, LITHOGRAPHY SYSTEM, STOR...
- Publication number 20150268560
- Publication date Sep 24, 2015
- Canon Kabushiki Kaisha
- Yoshihito Tada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, LITHOGRAPHY SYSTEM, STOR...
- Publication number 20150022793
- Publication date Jan 22, 2015
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20100259741
- Publication date Oct 14, 2010
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Noburu Takakura

Person

Patents Grantslast 30 patents

Measurement apparatus that measures position information of measure...

Information processing apparatus, storage medium, lithography appar...

Method of manufacturing pattern and article manufacturing method

Imprint apparatus, and method of manufacturing article

Lithography apparatus, lithography method, lithography system, stor...

Lithography apparatus, lithography method, lithography system, stor...

Lithography apparatus, lithography method, lithography system, stor...

Exposure apparatus, exposure method, and device manufacturing method

Aligning method

Aligning method

Aligning method utilizing reliability weighting coefficients

Patents Applicationslast 30 patents

MEASUREMENT APPARATUS THAT MEASURES POSITION INFORMATION OF MEASURE...

PROCESSING APPARATUS, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS,...

MEASUREMENT APPARATUS THAT MEASURES POSITION INFORMATION OF MEASURE...

METHOD OF MANUFACTURING PATTERN AND ARTICLE MANUFACTURING METHOD

INFORMATION PROCESSING APPARATUS, STORAGE MEDIUM, LITHOGRAPHY APPAR...

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, LITHOGRAPHY SYSTEM, STOR...

IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, LITHOGRAPHY SYSTEM, STOR...

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, LITHOGRAPHY SYSTEM, STOR...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD