NOBUSHIGE KORENAGA

Person

UTSUNOMIYA-SHI, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Positioning apparatus, lithography apparatus, and method of manufac...
- Patent number 9,977,347
- Issue date May 22, 2018
- Canon Kabushiki Kaisha
- Kentaro Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, and method of manufacturing an article
- Patent number 9,947,508
- Issue date Apr 17, 2018
- Canon Kabushiki Kaisha
- Daisuke Iwase
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, stage apparatus, and method of manufacturing...
- Patent number 9,823,587
- Issue date Nov 21, 2017
- Canon Kabushiki Kaisha
- Tadashi Kimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, and method of manufacturing article
- Patent number 9,547,242
- Issue date Jan 17, 2017
- Canon Kabushiki Kaisha
- Atsushi Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Guide apparatus, exposure apparatus, and method of manufacturing ar...
- Patent number 9,373,532
- Issue date Jun 21, 2016
- Canon Kabushiki Kaisha
- Akira Morohashi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Processing apparatus and article manufacturing method using same
- Patent number 9,310,688
- Issue date Apr 12, 2016
- Canon Kabushiki Kaisha
- Daisuke Iwase
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Stage apparatus with flexible utility line, lithography apparatus,...
- Patent number 9,280,068
- Issue date Mar 8, 2016
- Canon Kabushiki Kaisha
- Akira Morohashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus, lithography apparatus and method of manufacturing...
- Patent number 9,280,066
- Issue date Mar 8, 2016
- Canon Kabushiki Kaisha
- Hiroshi Kii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Driving apparatus, exposure apparatus, and method of manufacturing...
- Patent number 9,124,151
- Issue date Sep 1, 2015
- Canon Kabushiki Kaisha
- Akira Morohashi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Imprint apparatus for forming a pattern of a resin on a substrate u...
- Patent number 8,834,769
- Issue date Sep 16, 2014
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus and article manufacturing method
- Patent number 8,810,770
- Issue date Aug 19, 2014
- Canon Kabushiki Kaisha
- Yuji Maehara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus and method for producing article
- Patent number 8,562,323
- Issue date Oct 22, 2013
- Canon Kabushiki Kaisha
- Hirohito Ito
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam drawing apparatus and article manufacturing m...
- Patent number 8,476,607
- Issue date Jul 2, 2013
- Canon Kabushiki Kaisha
- Tomonori Ishikawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Aligning apparatus including an attraction preventing plate provide...
- Patent number 7,547,998
- Issue date Jun 16, 2009
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Driving apparatus, exposure apparatus, and device manufacturing method
- Patent number 7,508,099
- Issue date Mar 24, 2009
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Anti-vibration technique
- Patent number 7,383,929
- Issue date Jun 10, 2008
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Linear motor, moving stage system, exposure apparatus, and device m...
- Patent number 7,348,695
- Issue date Mar 25, 2008
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,307,692
- Issue date Dec 11, 2007
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus, exposure apparatus, and device manufacturing method
- Patent number 7,282,819
- Issue date Oct 16, 2007
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage system including fine-motion cable unit, exposure apparatus,...
- Patent number 7,280,185
- Issue date Oct 9, 2007
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus and exposure apparatus using the same
- Patent number 7,227,284
- Issue date Jun 5, 2007
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Aligning apparatus, exposure apparatus, and device manufacturing me...
- Patent number 7,075,197
- Issue date Jul 11, 2006
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Alignment apparatus and exposure apparatus using the same
- Patent number 7,075,198
- Issue date Jul 11, 2006
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Linear motor, moving stage system, exposure apparatus, and device m...
- Patent number 7,067,942
- Issue date Jun 27, 2006
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage system including fine-motion cable unit, exposure apparatus,...
- Patent number 7,057,710
- Issue date Jun 6, 2006
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage system, exposure apparatus, and device manufacturing method
- Patent number 7,030,964
- Issue date Apr 18, 2006
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Alignment apparatus and exposure apparatus using the same
- Patent number 6,987,335
- Issue date Jan 17, 2006
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Supporting apparatus having a plurality of magnets that generate a...
- Patent number 6,954,041
- Issue date Oct 11, 2005
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Supporting system in exposure apparatus
- Patent number 6,952,254
- Issue date Oct 4, 2005
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage apparatus and method of controlling the same
- Patent number 6,946,757
- Issue date Sep 20, 2005
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
STRUCTURE, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20240393704
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- Norihiro SAKURAKAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20240290650
- Publication date Aug 29, 2024
- Canon Kabushiki Kaisha
- KAZUNORI NAKAJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFAC...
- Publication number 20170329237
- Publication date Nov 16, 2017
- Canon Kabushiki Kaisha
- Kentaro Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLES MANUFACTURING...
- Publication number 20150364292
- Publication date Dec 17, 2015
- Canon Kabushiki Kaisha
- Tomonori Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVING APPARATUS AND CHARGED PARTICLE BEAM DRAWING SYSTEM
- Publication number 20150348744
- Publication date Dec 3, 2015
- Canon Kabushiki Kaisha
- Shinji Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE
- Publication number 20150318145
- Publication date Nov 5, 2015
- Canon Kabushiki Kaisha
- Daisuke Iwase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, STAGE APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20150277229
- Publication date Oct 1, 2015
- Canon Kabushiki Kaisha
- Tadashi Kimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150219998
- Publication date Aug 6, 2015
- Canon Kabushiki Kaisha
- Atsushi ITO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150219447
- Publication date Aug 6, 2015
- Canon Kabushiki Kaisha
- Atsushi ITO
- G01 - MEASURING TESTING
Information Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150187540
- Publication date Jul 2, 2015
- Canon Kabushiki Kaisha
- Atsushi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING...
- Publication number 20150029484
- Publication date Jan 29, 2015
- Canon Kabushiki Kaisha
- Hiroshi Kii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20140118710
- Publication date May 1, 2014
- Canon Kabushiki Kaisha
- Akira Morohashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
- Publication number 20140111780
- Publication date Apr 24, 2014
- Canon Kabushiki Kaisha
- Daisuke Iwase
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20140036249
- Publication date Feb 6, 2014
- Canon Kabushiki Kaisha
- Hiroshi Kii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GUIDE APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING AR...
- Publication number 20130273477
- Publication date Oct 17, 2013
- Canon Kabushiki Kaisha
- Akira MOROHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRIVING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20130271743
- Publication date Oct 17, 2013
- Canon Kabushiki Kaisha
- Akira MOROHASHI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130171570
- Publication date Jul 4, 2013
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING M...
- Publication number 20130011797
- Publication date Jan 10, 2013
- Canon Kabushiki Kaisha
- Tomonori Ishikawa
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20110310366
- Publication date Dec 22, 2011
- Canon Kabushiki Kaisha
- Yuji Maehara
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE
- Publication number 20110159189
- Publication date Jun 30, 2011
- Canon Kabushiki Kaisha
- Hirohito Ito
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND MANUFACTURING METHOD OF COMMODITIES
- Publication number 20110084423
- Publication date Apr 14, 2011
- Canon Kabushiki Kaisha
- Nobushige KORENAGA
- B82 - NANO-TECHNOLOGY
Information Patent Application
DRIVING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20070267920
- Publication date Nov 22, 2007
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT APPARATUS AND EXPOSURE APPARATUS USING THE SAME
- Publication number 20070228844
- Publication date Oct 4, 2007
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment apparatus and exposure apparatus using the same
- Publication number 20060214519
- Publication date Sep 28, 2006
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Aligning apparatus, exposure apparatus, and device manufacturing me...
- Publication number 20060202568
- Publication date Sep 14, 2006
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage system including fine-motion cable unit, exposure apparatus,...
- Publication number 20060187439
- Publication date Aug 24, 2006
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Linear motor, moving stage system, exposure apparatus, and device m...
- Publication number 20060082225
- Publication date Apr 20, 2006
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage system, exposure apparatus, and device manufacturing method
- Publication number 20060082755
- Publication date Apr 20, 2006
- Canon Kabushiki Kaisha
- Kotaro Akutsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Supporting system in exposure apparatus
- Publication number 20050270517
- Publication date Dec 8, 2005
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment apparatus and exposure apparatus using the same
- Publication number 20050248219
- Publication date Nov 10, 2005
- Canon Kabushiki Kaisha
- Nobushige Korenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

NOBUSHIGE KORENAGA

Person

Patents Grantslast 30 patents

Positioning apparatus, lithography apparatus, and method of manufac...

Lithography apparatus, and method of manufacturing an article

Lithography apparatus, stage apparatus, and method of manufacturing...

Lithography apparatus, and method of manufacturing article

Guide apparatus, exposure apparatus, and method of manufacturing ar...

Processing apparatus and article manufacturing method using same

Stage apparatus with flexible utility line, lithography apparatus,...

Stage apparatus, lithography apparatus and method of manufacturing...

Driving apparatus, exposure apparatus, and method of manufacturing...

Imprint apparatus for forming a pattern of a resin on a substrate u...

Exposure apparatus and article manufacturing method

Imprint apparatus and method for producing article

Charged particle beam drawing apparatus and article manufacturing m...

Aligning apparatus including an attraction preventing plate provide...

Driving apparatus, exposure apparatus, and device manufacturing method

Anti-vibration technique

Linear motor, moving stage system, exposure apparatus, and device m...

Exposure apparatus and device manufacturing method

Stage apparatus, exposure apparatus, and device manufacturing method

Stage system including fine-motion cable unit, exposure apparatus,...

Alignment apparatus and exposure apparatus using the same

Aligning apparatus, exposure apparatus, and device manufacturing me...

Alignment apparatus and exposure apparatus using the same

Linear motor, moving stage system, exposure apparatus, and device m...

Stage system including fine-motion cable unit, exposure apparatus,...

Stage system, exposure apparatus, and device manufacturing method

Alignment apparatus and exposure apparatus using the same

Supporting apparatus having a plurality of magnets that generate a...

Supporting system in exposure apparatus

Stage apparatus and method of controlling the same

Patents Applicationslast 30 patents

STRUCTURE, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING METHOD

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...

POSITIONING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFAC...

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLES MANUFACTURING...

MOVING APPARATUS AND CHARGED PARTICLE BEAM DRAWING SYSTEM

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING AN ARTICLE

LITHOGRAPHY APPARATUS, STAGE APPARATUS, AND METHOD OF MANUFACTURING...

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE

STAGE APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING...

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...

PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...

GUIDE APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING AR...

DRIVING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING...

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING M...

EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE

IMPRINT APPARATUS AND MANUFACTURING METHOD OF COMMODITIES

DRIVING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

ALIGNMENT APPARATUS AND EXPOSURE APPARATUS USING THE SAME

Alignment apparatus and exposure apparatus using the same

Aligning apparatus, exposure apparatus, and device manufacturing me...

Stage system including fine-motion cable unit, exposure apparatus,...

Linear motor, moving stage system, exposure apparatus, and device m...

Stage system, exposure apparatus, and device manufacturing method

Supporting system in exposure apparatus

Alignment apparatus and exposure apparatus using the same