Nobutaka Fukunaga

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,194,594
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Nobutaka Fukunaga
- B24 - GRINDING POLISHING
Information Patent Grant
Optical processing apparatus, coating/development apparatus, optica...
- Patent number 10,527,948
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Seiji Nagahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, exposure method and storage medium
- Patent number 10,274,843
- Issue date Apr 30, 2019
- Tokyo Electron Limited
- Seiji Nagahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and co...
- Patent number 8,774,491
- Issue date Jul 8, 2014
- Tokyo Electron Limited
- Shinichi Seki
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220402094
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Nobutaka FUKUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220402087
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Nobutaka FUKUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220080551
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Nobutaka FUKUNAGA
- B24 - GRINDING POLISHING
Information Patent Application
PROCESSING APPARATUS, PROCESSING METHOD AND COMPUTER- READABLE RECO...
- Publication number 20210362290
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Tomohiro KANEKO
- B24 - GRINDING POLISHING
Information Patent Application
OPTICAL PROCESSING APPARATUS, COATING/DEVELOPMENT APPARATUS, OPTICA...
- Publication number 20180173103
- Publication date Jun 21, 2018
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD AND STORAGE MEDIUM
- Publication number 20180143540
- Publication date May 24, 2018
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20120257813
- Publication date Oct 11, 2012
- Shinichi SEKI
- G06 - COMPUTING CALCULATING COUNTING

Nobutaka Fukunaga

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Optical processing apparatus, coating/development apparatus, optica...

Exposure apparatus, exposure method and storage medium

Substrate processing apparatus, substrate processing method, and co...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PROCESSING APPARATUS, PROCESSING METHOD AND COMPUTER- READABLE RECO...

OPTICAL PROCESSING APPARATUS, COATING/DEVELOPMENT APPARATUS, OPTICA...

EXPOSURE APPARATUS, EXPOSURE METHOD AND STORAGE MEDIUM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...