Nobutaka Magome

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Mark, method for forming same, and exposure apparatus
- Patent number 10,461,039
- Issue date Oct 29, 2019
- Nikon Corporation
- Yuji Shiba
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mark, method for forming same, and exposure apparatus
- Patent number 10,236,259
- Issue date Mar 19, 2019
- Nikon Corporation
- Yuji Shiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, method for producing device, and method for con...
- Patent number 10,185,232
- Issue date Jan 22, 2019
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark, method for forming same, and exposure apparatus
- Patent number 9,941,217
- Issue date Apr 10, 2018
- Nikon Corporation
- Yuji Shiba
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,846,371
- Issue date Dec 19, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, method for producing device, and method for con...
- Patent number 9,760,026
- Issue date Sep 12, 2017
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, method for producing device, and method for con...
- Patent number 9,494,871
- Issue date Nov 15, 2016
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,268,237
- Issue date Feb 23, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,235,139
- Issue date Jan 12, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,019,467
- Issue date Apr 28, 2015
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, method for producing device, and method for con...
- Patent number 8,749,757
- Issue date Jun 10, 2014
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, method for producing device, and method for con...
- Patent number 8,451,424
- Issue date May 28, 2013
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 8,384,880
- Issue date Feb 26, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 8,208,117
- Issue date Jun 26, 2012
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 8,040,491
- Issue date Oct 18, 2011
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,034,539
- Issue date Oct 11, 2011
- Nikon Corporation
- Nobutaka Magome
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,911,582
- Issue date Mar 22, 2011
- Nikon Corporation
- Shigeru Hirukawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 7,515,246
- Issue date Apr 7, 2009
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, method for producing device, and method for con...
- Patent number 7,505,115
- Issue date Mar 17, 2009
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 7,483,119
- Issue date Jan 27, 2009
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 7,466,392
- Issue date Dec 16, 2008
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 7,460,207
- Issue date Dec 2, 2008
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 7,436,487
- Issue date Oct 14, 2008
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 7,379,158
- Issue date May 27, 2008
- Nikon Corporation
- Hideo Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and apparatus therefor
- Patent number 6,876,946
- Issue date Apr 5, 2005
- Nikon Corporation
- Masahiko Yasuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus having compact substrate stage
- Patent number 6,798,516
- Issue date Sep 28, 2004
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask producing method and apparatus and device manufacturing m...
- Patent number 6,677,088
- Issue date Jan 13, 2004
- Nikon Corporation
- Nobutaka Magome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting optical device
- Patent number 6,650,421
- Issue date Nov 18, 2003
- Nikon Corporation
- Nobutaka Magome
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring exposure condition in projection exposure appar...
- Patent number 6,583,853
- Issue date Jun 24, 2003
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjusting method for position detecting apparatus
- Patent number 6,538,740
- Issue date Mar 25, 2003
- Nikon Corporation
- Naomasa Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MARK, METHOD FOR FORMING SAME, AND EXPOSURE APPARATUS
- Publication number 20190164900
- Publication date May 30, 2019
- Nikon Corporation
- Yuji SHIBA
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS, METHOD FOR PRODUCING DEVICE, AND METHOD FOR CON...
- Publication number 20190121246
- Publication date Apr 25, 2019
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MARK, METHOD FOR FORMING SAME, AND EXPOSURE APPARATUS
- Publication number 20180197820
- Publication date Jul 12, 2018
- Nikon Corporation
- Yuji SHIBA
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS, METHOD FOR PRODUCING DEVICE, AND METHOD FOR CON...
- Publication number 20170363972
- Publication date Dec 21, 2017
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20170329234
- Publication date Nov 16, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, METHOD FOR PRODUCING DEVICE, AND METHOD FOR CON...
- Publication number 20170038694
- Publication date Feb 9, 2017
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20150301457
- Publication date Oct 22, 2015
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MARK, METHOD FOR FORMING SAME, AND EXPOSURE APPARATUS
- Publication number 20150200165
- Publication date Jul 16, 2015
- Nikon Corporation
- Yuji SHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS, METHOD FOR PRODUCING DEVICE, AND METHOD FOR CON...
- Publication number 20140233002
- Publication date Aug 21, 2014
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20130141703
- Publication date Jun 6, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20130141701
- Publication date Jun 6, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, METHOD FOR PRODUCING DEVICE, AND METHOD FOR CON...
- Publication number 20130135597
- Publication date May 30, 2013
- Nikon Corporation
- Nobutaka MAGOME
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20110279794
- Publication date Nov 17, 2011
- Nikon Corporation
- Shigeru Hirukawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20110051106
- Publication date Mar 3, 2011
- Nikon Corporation
- Shigeru Hirukawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20090079950
- Publication date Mar 26, 2009
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20090015816
- Publication date Jan 15, 2009
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20090015807
- Publication date Jan 15, 2009
- Nikon Corporation
- Shigeru Hirukawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20090015808
- Publication date Jan 15, 2009
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20090002655
- Publication date Jan 1, 2009
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20080151203
- Publication date Jun 26, 2008
- Nikon Corporation
- Shigeru Hirukawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20080117394
- Publication date May 22, 2008
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20070263196
- Publication date Nov 15, 2007
- Nikon Corporation
- Shigeru Hirukawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20070258063
- Publication date Nov 8, 2007
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus, Exposure Method and Device Manufacturing Method...
- Publication number 20070247640
- Publication date Oct 25, 2007
- Nikon Corporation
- Nobutaka Magome
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20070171391
- Publication date Jul 26, 2007
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20070115447
- Publication date May 24, 2007
- Nikon Corporation
- Shigeru Hirukawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20070035710
- Publication date Feb 15, 2007
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20060274294
- Publication date Dec 7, 2006
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20060227312
- Publication date Oct 12, 2006
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20060154183
- Publication date Jul 13, 2006
- Nikon Corporation
- Nobutaka Magome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Nobutaka Magome

Person

Patents Grantslast 30 patents

Mark, method for forming same, and exposure apparatus

Mark, method for forming same, and exposure apparatus

Exposure apparatus, method for producing device, and method for con...

Mark, method for forming same, and exposure apparatus

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus, method for producing device, and method for con...

Exposure apparatus, method for producing device, and method for con...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus, method for producing device, and method for con...

Exposure apparatus, method for producing device, and method for con...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus and method for producing device

Exposure apparatus and device manufacturing method

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, method for producing device, and method for con...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Alignment method and apparatus therefor

Projection exposure apparatus having compact substrate stage

Photomask producing method and apparatus and device manufacturing m...

Method and apparatus for inspecting optical device

Method of measuring exposure condition in projection exposure appar...

Adjusting method for position detecting apparatus

Patents Applicationslast 30 patents

MARK, METHOD FOR FORMING SAME, AND EXPOSURE APPARATUS

EXPOSURE APPARATUS, METHOD FOR PRODUCING DEVICE, AND METHOD FOR CON...

MARK, METHOD FOR FORMING SAME, AND EXPOSURE APPARATUS

EXPOSURE APPARATUS, METHOD FOR PRODUCING DEVICE, AND METHOD FOR CON...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

EXPOSURE APPARATUS, METHOD FOR PRODUCING DEVICE, AND METHOD FOR CON...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

MARK, METHOD FOR FORMING SAME, AND EXPOSURE APPARATUS

EXPOSURE APPARATUS, METHOD FOR PRODUCING DEVICE, AND METHOD FOR CON...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

EXPOSURE APPARATUS, METHOD FOR PRODUCING DEVICE, AND METHOD FOR CON...

Exposure apparatus and device manufacturing method

Exposure apparatus and device manufacturing method

Exposure apparatus, exposure method, and method for producing device

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus and device manufacturing method

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus and device manufacturing method

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus and device manufacturing method

Exposure apparatus, exposure method, and method for producing device

Exposure Apparatus, Exposure Method and Device Manufacturing Method...

Exposure apparatus and method for producing device

Exposure apparatus and device manufacturing method

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus and method for producing device