Nobutaka Mizutani

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plating method and recording medium
- Patent number 11,519,074
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Kazutoshi Iwai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming method of hard mask
- Patent number 11,004,684
- Issue date May 11, 2021
- Tokyo Electron Limited
- Mitsuaki Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal wiring layer forming method, metal wiring layer forming appar...
- Patent number 10,755,973
- Issue date Aug 25, 2020
- Tokyo Electron Limited
- Keiichi Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating apparatus, plating method, and recording medium
- Patent number 10,731,256
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Kazutoshi Iwai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming method of hard mask, forming apparatus of hard mask and rec...
- Patent number 10,224,202
- Issue date Mar 5, 2019
- Tokyo Electron Limited
- Mitsuaki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method and recording medium
- Patent number 10,224,208
- Issue date Mar 5, 2019
- Tokyo Electron Limited
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method, plated component, and plating system
- Patent number 10,179,950
- Issue date Jan 15, 2019
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method, plating apparatus, and storage medium
- Patent number 10,138,556
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method, plating system and storage medium
- Patent number 10,030,308
- Issue date Jul 24, 2018
- Tokyo Electron Limited
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Catalyst layer forming method, catalyst layer forming system and re...
- Patent number 9,966,306
- Issue date May 8, 2018
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing wiring structure, copper displacement plat...
- Patent number 9,888,585
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Shoso Shinguhara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plating method, plating system and storage medium
- Patent number 9,837,308
- Issue date Dec 5, 2017
- Tokyo Electron Limited
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method, plating apparatus and storage medium
- Patent number 9,725,810
- Issue date Aug 8, 2017
- Tokyo Electron Limited
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating method, recording medium and plating system
- Patent number 9,711,363
- Issue date Jul 18, 2017
- Tokyo Electron Limited
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal wiring layer forming method, metal wiring layer forming appar...
- Patent number 9,653,354
- Issue date May 16, 2017
- Tokyo Electron Limited
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-treatment method for plating and storage medium
- Patent number 9,653,350
- Issue date May 16, 2017
- Tokyo Electron Limited
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-treatment method of plating, storage medium, and plating system
- Patent number 9,650,717
- Issue date May 16, 2017
- Tokyo Electron Limited
- Kazutoshi Iwai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating apparatus, plating method, and storage medium
- Patent number 9,552,994
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid processing method, liquid processing apparatus and recording...
- Patent number 8,741,070
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Nobutaka Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing trench structure for device
- Patent number 7,176,142
- Issue date Feb 13, 2007
- Tokyo Electron Limited
- Nobutaka Mizutani
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM
- Publication number 20210115565
- Publication date Apr 22, 2021
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING SYSTEM, AND RECORDING MEDIUM
- Publication number 20210108316
- Publication date Apr 15, 2021
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD AND RECORDING MEDIUM
- Publication number 20200325581
- Publication date Oct 15, 2020
- TOKYO ELECTRON LIMITED
- Kazutoshi Iwai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL WIRING LAYER FORMING METHOD, METAL WIRING LAYER FORMING APPAR...
- Publication number 20190229016
- Publication date Jul 25, 2019
- TOKYO ELECTRON LIMITED
- Keiichi Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING METHOD OF HARD MASK
- Publication number 20190157083
- Publication date May 23, 2019
- TOKYO ELECTRON LIMITED
- Mitsuaki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING APPARATUS, PLATING METHOD, AND RECORDING MEDIUM
- Publication number 20170292192
- Publication date Oct 12, 2017
- TOKYO ELECTRON LIMITED
- Kazutoshi Iwai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMING METHOD OF HARD MASK, FORMING APPARATUS OF HARD MASK AND REC...
- Publication number 20170287713
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Mitsuaki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING APPARATUS, PLATING METHOD AND RECORDING MEDIUM
- Publication number 20170121822
- Publication date May 4, 2017
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20170084480
- Publication date Mar 23, 2017
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATED COMPONENT, AND PLATING SYSTEM
- Publication number 20160372367
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD AND RECORDING MEDIUM
- Publication number 20160336179
- Publication date Nov 17, 2016
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING METHOD, RECORDING MEDIUM AND PLATING SYSTEM
- Publication number 20160307759
- Publication date Oct 20, 2016
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE, PLATING METHOD, PLATING SYSTEM AND RECORDING...
- Publication number 20160247765
- Publication date Aug 25, 2016
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CATALYST LAYER FORMING METHOD, CATALYST LAYER FORMING SYSTEM AND RE...
- Publication number 20160247683
- Publication date Aug 25, 2016
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL WIRING LAYER FORMING METHOD, METAL WIRING LAYER FORMING APPAR...
- Publication number 20160240436
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING WIRING STRUCTURE, COPPER DISPLACEMENT PLAT...
- Publication number 20160095228
- Publication date Mar 31, 2016
- TOKYO ELECTRON LIMITED
- Shoso Shinguhara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PRE-TREATMENT METHOD OF PLATING, STORAGE MEDIUM, AND PLATING SYSTEM
- Publication number 20150247242
- Publication date Sep 3, 2015
- TOKYO ELECTRON LIMITED
- Kazutoshi Iwai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROLESS PLATING METHOD, ELECTROLESS PLATING APPARATUS AND STORA...
- Publication number 20150218702
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING APPARATUS, PLATING METHOD, AND STORAGE MEDIUM
- Publication number 20150167174
- Publication date Jun 18, 2015
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING APPARATUS, AND STORAGE MEDIUM
- Publication number 20150147476
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-TREATMENT METHOD FOR PLATING AND STORAGE MEDIUM
- Publication number 20150140816
- Publication date May 21, 2015
- TOKYO ELECTRON LIMITED
- Takashi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATING APPARATUS, PLATING METHOD, AND STORAGE MEDIUM
- Publication number 20150099355
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING SYSTEM AND STORAGE MEDIUM
- Publication number 20150079785
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING SYSTEM AND STORAGE MEDIUM
- Publication number 20150030774
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATING METHOD, PLATING APPARATUS AND STORAGE MEDIUM
- Publication number 20140127410
- Publication date May 8, 2014
- TOKYO ELECTRON LIMITED
- Nobutaka Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Liquid Processing Method, Liquid Processing Apparatus and Recording...
- Publication number 20120160273
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Nobutaka MIZUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL SOLUTION OR PURE WATER FEEDER, SUBSTRATE PROCESSING SYSTEM...
- Publication number 20090107521
- Publication date Apr 30, 2009
- Tohoku University
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing trench structure for device
- Publication number 20070148985
- Publication date Jun 28, 2007
- Nobutaka Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing trench structure for device
- Publication number 20040002214
- Publication date Jan 1, 2004
- Nobutaka Mizutani
- H01 - BASIC ELECTRIC ELEMENTS

Nobutaka Mizutani

Person

Patents Grantslast 30 patents

Plating method and recording medium

Forming method of hard mask

Metal wiring layer forming method, metal wiring layer forming appar...

Plating apparatus, plating method, and recording medium

Forming method of hard mask, forming apparatus of hard mask and rec...

Plating method and recording medium

Plating method, plated component, and plating system

Plating method, plating apparatus, and storage medium

Plating method, plating system and storage medium

Catalyst layer forming method, catalyst layer forming system and re...

Method for manufacturing wiring structure, copper displacement plat...

Plating method, plating system and storage medium

Plating method, plating apparatus and storage medium

Plating method, recording medium and plating system

Metal wiring layer forming method, metal wiring layer forming appar...

Pre-treatment method for plating and storage medium

Pre-treatment method of plating, storage medium, and plating system

Plating apparatus, plating method, and storage medium

Liquid processing method, liquid processing apparatus and recording...

Method of manufacturing trench structure for device

Patents Applicationslast 30 patents

PLATING METHOD, PLATING APPARATUS AND RECORDING MEDIUM

PLATING METHOD, PLATING SYSTEM, AND RECORDING MEDIUM

PLATING METHOD AND RECORDING MEDIUM

METAL WIRING LAYER FORMING METHOD, METAL WIRING LAYER FORMING APPAR...

FORMING METHOD OF HARD MASK

PLATING APPARATUS, PLATING METHOD, AND RECORDING MEDIUM

FORMING METHOD OF HARD MASK, FORMING APPARATUS OF HARD MASK AND REC...

PLATING APPARATUS, PLATING METHOD AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

PLATING METHOD, PLATED COMPONENT, AND PLATING SYSTEM

PLATING METHOD AND RECORDING MEDIUM

PLATING METHOD, RECORDING MEDIUM AND PLATING SYSTEM

SEMICONDUCTOR DEVICE, PLATING METHOD, PLATING SYSTEM AND RECORDING...

CATALYST LAYER FORMING METHOD, CATALYST LAYER FORMING SYSTEM AND RE...

METAL WIRING LAYER FORMING METHOD, METAL WIRING LAYER FORMING APPAR...

METHOD FOR MANUFACTURING WIRING STRUCTURE, COPPER DISPLACEMENT PLAT...

PRE-TREATMENT METHOD OF PLATING, STORAGE MEDIUM, AND PLATING SYSTEM

ELECTROLESS PLATING METHOD, ELECTROLESS PLATING APPARATUS AND STORA...

PLATING APPARATUS, PLATING METHOD, AND STORAGE MEDIUM

PLATING METHOD, PLATING APPARATUS, AND STORAGE MEDIUM

PRE-TREATMENT METHOD FOR PLATING AND STORAGE MEDIUM

PLATING APPARATUS, PLATING METHOD, AND STORAGE MEDIUM

PLATING METHOD, PLATING SYSTEM AND STORAGE MEDIUM

PLATING METHOD, PLATING SYSTEM AND STORAGE MEDIUM

PLATING METHOD, PLATING APPARATUS AND STORAGE MEDIUM

Liquid Processing Method, Liquid Processing Apparatus and Recording...

CHEMICAL SOLUTION OR PURE WATER FEEDER, SUBSTRATE PROCESSING SYSTEM...

Method of manufacturing trench structure for device

Method of manufacturing trench structure for device