Nobutaka SASAKI

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate support and substrate processing apparatus
- Patent number 12,165,854
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Nobutaka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and transfer method
- Patent number 12,165,893
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of driving relay member
- Patent number 12,027,346
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Nobutaka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method for processing object
- Patent number 10,264,630
- Issue date Apr 16, 2019
- Tokyo Electron Limited
- Ryoichi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,249,478
- Issue date Apr 2, 2019
- Tokyo Electron Limited
- Nobutaka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 9,818,582
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Hiraku Murakami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230326725
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Shuichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
- Publication number 20230215753
- Publication date Jul 6, 2023
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND RING REPLACEMEN...
- Publication number 20230178417
- Publication date Jun 8, 2023
- TOKYO ELECTRON LIMITED
- Shin MATSUURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220406575
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Gyeong min PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220122816
- Publication date Apr 21, 2022
- TOKYO ELECTRON LIMITED
- Nobutaka SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND GAS SWITCHING METHOD FOR SUBSTRA...
- Publication number 20220059323
- Publication date Feb 24, 2022
- TOKYO ELECTRON LIMITED
- Nobutaka SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF DRIVING RELAY MEMBER
- Publication number 20220037125
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Nobutaka SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHUTTER MECHANISM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210027994
- Publication date Jan 28, 2021
- TOKYO ELECTRON LIMITED
- Suguru MOTEGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20200098550
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Shuichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20160372308
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Hiraku MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR PROCESSING OBJECT
- Publication number 20150245460
- Publication date Aug 27, 2015
- TOKYO ELECTRON LIMITED
- Ryoichi YOSHIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20150228462
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Akihiro Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150179415
- Publication date Jun 25, 2015
- TOKYO ELECTRON LIMITED
- Nobutaka SASAKI
- H01 - BASIC ELECTRIC ELEMENTS

Nobutaka SASAKI

Person

Patents Grantslast 30 patents

Substrate support and substrate processing apparatus

Substrate processing system and transfer method

Substrate processing apparatus and method of driving relay member

Plasma processing apparatus and method for processing object

Substrate processing apparatus

Plasma processing method

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD

SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND RING REPLACEMEN...

PLASMA PROCESSING APPARATUS

SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND GAS SWITCHING METHOD FOR SUBSTRA...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF DRIVING RELAY MEMBER

SHUTTER MECHANISM AND SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND METHOD FOR PROCESSING OBJECT

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS