Nobutake KABUKI

Person

  • Yamanashi, JP

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS

    • Publication number 20240254626
    • Publication date Aug 1, 2024
    • Tokyo Electron Limited
    • Hiroki YAMADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

    • Publication number 20230420294
    • Publication date Dec 28, 2023
    • Tokyo Electron Limited
    • Makoto WADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD

    • Publication number 20230361163
    • Publication date Nov 9, 2023
    • Tokyo Electron Limited
    • Koji AKIYAMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS

    • Publication number 20230102051
    • Publication date Mar 30, 2023
    • TOKYO ELECTRON LIMITED
    • Ryota IFUKU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION METHOD AND FILM FORMATION APPARATUS

    • Publication number 20230042099
    • Publication date Feb 9, 2023
    • Tokyo Electron Limited
    • Makoto WADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND DEVICE FOR FORMING HEXAGONAL BORON NITRIDE FILM

    • Publication number 20220165568
    • Publication date May 26, 2022
    • TOKYO ELECTRON LIMITED
    • Nobutake KABUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...