Nobutake KABUKI

Follow

Person

Yamanashi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230420294
- Publication date Dec 28, 2023
- Tokyo Electron Limited
- Makoto WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD
- Publication number 20230361163
- Publication date Nov 9, 2023
- Tokyo Electron Limited
- Koji AKIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230102051
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Ryota IFUKU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20230042099
- Publication date Feb 9, 2023
- Tokyo Electron Limited
- Makoto WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR FORMING HEXAGONAL BORON NITRIDE FILM
- Publication number 20220165568
- Publication date May 26, 2022
- TOKYO ELECTRON LIMITED
- Nobutake KABUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...