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Nobutake KABUKI
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Yamanashi, JP
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last 30 patents
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Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20240254626
Publication date
Aug 1, 2024
Tokyo Electron Limited
Hiroki YAMADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230420294
Publication date
Dec 28, 2023
Tokyo Electron Limited
Makoto WADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION METHOD
Publication number
20230361163
Publication date
Nov 9, 2023
Tokyo Electron Limited
Koji AKIYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20230102051
Publication date
Mar 30, 2023
TOKYO ELECTRON LIMITED
Ryota IFUKU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
Publication number
20230042099
Publication date
Feb 9, 2023
Tokyo Electron Limited
Makoto WADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR FORMING HEXAGONAL BORON NITRIDE FILM
Publication number
20220165568
Publication date
May 26, 2022
TOKYO ELECTRON LIMITED
Nobutake KABUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...