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Nobutoshi Abe
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Kawasaki, JP
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last 30 patents
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Patent Grant
Automatic photomask or reticle washing and cleaning system
Patent number
4,715,392
Issue date
Dec 29, 1987
Nippon Kogaku K.K.
Nobutoshi Abe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for detecting foreign matters on a planar substrate
Patent number
4,568,835
Issue date
Feb 4, 1986
Nippon Kogaku K.K.
Kazunori Imamura
G01 - MEASURING TESTING
Information
Patent Grant
Container for holding substrate
Patent number
4,422,547
Issue date
Dec 27, 1983
Nippon Kogaku K.K.
Nobutoshi Abe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY