Nobutoshi Terasawa

Person

Sapporo-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and method for monitoring process data
- Patent number 11,567,485
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Nobutoshi Terasawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Etching method, etching apparatus, and ring member
- Patent number 9,441,292
- Issue date Sep 13, 2016
- Tokyo Electron Limited
- Ayuta Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method, etching apparatus, and ring member
- Patent number 8,945,413
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Ayuta Suzuki
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Life estimating method for heater wire, heating apparatus, storage...
- Patent number 8,121,799
- Issue date Feb 21, 2012
- Tokyo Electron Limited
- Nobutoshi Terasawa
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
CHART GENERATION METHOD AND INFORMATION PROCESSING APPARATUS
- Publication number 20240020895
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Nobutoshi TERASAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INFORMATION PROCESSING APPARATUS, STORAGE MEDIUM, AND CONTROL METHOD
- Publication number 20240012373
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Nao AKASHI
- G05 - CONTROLLING REGULATING
Information Patent Application
ABNORMALITY DETECTION METHOD AND PROCESSING APPARATUS
- Publication number 20220270940
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Shingo HISHIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFORMATION PROCESSING APPARATUS AND MONITORING METHOD
- Publication number 20210397169
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Kazushi SHOJI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD FOR MONITORING PROCESS DATA
- Publication number 20210011468
- Publication date Jan 14, 2021
- TOKYO ELECTRON LIMITED
- Nobutoshi TERASAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER
- Publication number 20150206763
- Publication date Jul 23, 2015
- TOKYO ELECTRON LIMITED
- Ayuta Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER
- Publication number 20130186858
- Publication date Jul 25, 2013
- TOKYO ELECTRON LIMITED
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ABNORMALITY DETECTION APPARATUS FOR PERIODIC DRIVING SYSTEM, PROCES...
- Publication number 20130148817
- Publication date Jun 13, 2013
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
LIFE ESTIMATING METHOD FOR HEATER WIRE, HEATING APPARATUS, STORAGE...
- Publication number 20120169505
- Publication date Jul 5, 2012
- TOKYO ELECTRON LIMITED
- Nobutoshi Terasawa
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
Life estimating method for heater wire, heating apparatus, storage...
- Publication number 20080262791
- Publication date Oct 23, 2008
- TOKYO ELECTRON LIMITED
- Nobutoshi Terasawa
- F27 - FURNACES KILNS OVENS RETORTS

Nobutoshi Terasawa

Person

Patents Grantslast 30 patents

Substrate processing system and method for monitoring process data

Etching method, etching apparatus, and ring member

Etching method, etching apparatus, and ring member

Life estimating method for heater wire, heating apparatus, storage...

Patents Applicationslast 30 patents

CHART GENERATION METHOD AND INFORMATION PROCESSING APPARATUS

INFORMATION PROCESSING APPARATUS, STORAGE MEDIUM, AND CONTROL METHOD

ABNORMALITY DETECTION METHOD AND PROCESSING APPARATUS

INFORMATION PROCESSING APPARATUS AND MONITORING METHOD

SUBSTRATE PROCESSING SYSTEM AND METHOD FOR MONITORING PROCESS DATA

ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER

ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER

ABNORMALITY DETECTION APPARATUS FOR PERIODIC DRIVING SYSTEM, PROCES...

LIFE ESTIMATING METHOD FOR HEATER WIRE, HEATING APPARATUS, STORAGE...

Life estimating method for heater wire, heating apparatus, storage...