TREA

Nobuya MIYOSHI

Follow

Person

  • Tokyo, JP
People

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20230118576
    • Publication date Apr 20, 2023
    • Hitachi High-Tech Corporation
    • Hiroyuki Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20210366721
    • Publication date Nov 25, 2021
    • Hitachi High-Technologies Corporation
    • Hiroyuki KOBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20210151298
    • Publication date May 20, 2021
    • HITACHI HIGH-TECH CORPORATION
    • Hiroyuki KOBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20200328099
    • Publication date Oct 15, 2020
    • HITACHI HIGH-TECH CORPORATION
    • Hiroyuki KOBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
    • Publication number 20200006079
    • Publication date Jan 2, 2020
    • Hitachi High-Technologies Corporation
    • Nobuya MIYOSHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20190237302
    • Publication date Aug 1, 2019
    • Hitachi High-Technologies Corporation
    • Hiroyuki KOBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND ETCHING APPARATUS
    • Publication number 20190067032
    • Publication date Feb 28, 2019
    • Hitachi High-Technologies Corporation
    • Kazunori SHINODA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20180122665
    • Publication date May 3, 2018
    • Hitachi High-Technologies Corporation
    • Hiroyuki KOBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    OPERATION METHOD OF PLASMA PROCESSING APPARATUS
    • Publication number 20180090345
    • Publication date Mar 29, 2018
    • Hitachi High-Technologies Corporation
    • Yutaka KOUZUMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND ETCHING APPARATUS
    • Publication number 20180076051
    • Publication date Mar 15, 2018
    • Hitachi High-Technologies Corporation
    • Kazunori SHINODA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20170229290
    • Publication date Aug 10, 2017
    • Hitachi High-Technologies Corporation
    • Hiroyuki KOBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20170018405
    • Publication date Jan 19, 2017
    • Hitachi High-Technologies Corporation
    • Hiroyuki KOBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS