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Nobuya Yamamoto

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  • Kumamoto, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 10,593,571
    • Issue date Mar 17, 2020
    • Tokyo Electron Limited
    • Hiroaki Inadomi
    • B08 - CLEANING
  • Information Patent Grant

    Liquid processing apparatus
    • Patent number 10,046,372
    • Issue date Aug 14, 2018
    • Tokyo Electron Limited
    • Kazuya Goda
    • B08 - CLEANING

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20170287742
    • Publication date Oct 5, 2017
    • TOKYO ELECTRON LIMITED
    • Hiroaki Inadomi
    • B08 - CLEANING
  • Information Patent Application

    LIQUID PROCESSING APPARATUS
    • Publication number 20170028450
    • Publication date Feb 2, 2017
    • TOKYO ELECTRON LIMITED
    • Kazuya Goda
    • B08 - CLEANING