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NOBUYOSHI DEGUCHI
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KAWACHI-GUN, JP
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Patents Grants
last 30 patents
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Patent Grant
Scanning exposure method and apparatus, and device manufacturing me...
Patent number
6,856,404
Issue date
Feb 15, 2005
Canon Kabushiki Kaisha
Kazunori Iwamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Driving apparatus and exposure apparatus
Patent number
6,493,062
Issue date
Dec 10, 2002
Canon Kabushiki Kaisha
Yukio Tokuda
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
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Patent Application
SCANNING EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING ME...
Publication number
20030151748
Publication date
Aug 14, 2003
KAZUNORI IWAMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DRIVING APPARATUS AND EXPOSURE APPARATUS
Publication number
20020054280
Publication date
May 9, 2002
YUKIO TOKUDA
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...