Nobuyoshi Deguchi

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, coating/developing apparatus, method of transfe...
- Patent number 6,638,672
- Issue date Oct 28, 2003
- Canon Kabushiki Kaisha
- Nobuyoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reference plate, exposure apparatus, device manufacturing system, d...
- Patent number 6,608,666
- Issue date Aug 19, 2003
- Canon Kabushiki Kaisha
- Nobuyoshi Deguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer chuck
- Patent number 4,747,608
- Issue date May 31, 1988
- Canon Kabushiki Kaisha
- Mitsuya Sato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Reference plate, exposure apparatus, device manufacturing system, d...
- Publication number 20020067473
- Publication date Jun 6, 2002
- Nobuyoshi Deguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, coating/developing apparatus, method of transfe...
- Publication number 20020009813
- Publication date Jan 24, 2002
- Nobuyoshi Deguchi
- H01 - BASIC ELECTRIC ELEMENTS