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Nobuyoshi Sato
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Chiba, JP
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last 30 patents
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Patent Grant
Method of manufacturing insulating film of semiconductor device and...
Patent number
5,605,867
Issue date
Feb 25, 1997
Kawasaki Steel Corporation
Nobuyoshi Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of chemical mechanical polishing planarization of an insulat...
Patent number
5,532,191
Issue date
Jul 2, 1996
Kawasaki Steel Corporation
Tadashi Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device having an insulating...
Patent number
5,336,640
Issue date
Aug 9, 1994
Kawasaki Steel Corporation
Nobuyoshi Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma CVD system comprising plural upper electrodes
Patent number
5,296,037
Issue date
Mar 22, 1994
Kawasaki Steel Corporation
Nobuyoshi Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming interlayer-insulating film using ozone and organi...
Patent number
5,290,736
Issue date
Mar 1, 1994
Kawasaki Steel Corporation
Nobuyoshi Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...