Nobuyoshi Tanno

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Miyagi-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transport apparatus and method, exposure apparatus and ex...
- Patent number 8,755,025
- Issue date Jun 17, 2014
- Nikon Corporation
- Nobuyoshi Tanno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate transport apparatus and method, exposure apparatus and ex...
- Patent number 7,898,645
- Issue date Mar 1, 2011
- Zao Nikon Co., Ltd.
- Nobuyoshi Tanno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate storage cassette positioning device and method
- Patent number 6,432,849
- Issue date Aug 13, 2002
- Nikon Corporation
- Yutaka Endo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate transport apparatus and method, exposure apparatus and ex...
- Publication number 20110122393
- Publication date May 26, 2011
- Zao Nikon Co., Ltd.
- Nobuyoshi Tanno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate transport apparatus and method, exposure apparatus and ex...
- Publication number 20070052942
- Publication date Mar 8, 2007
- Zao Nikon Co., Ltd.
- Nobuyoshi Tanno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate transport apparatus and method, exposure apparatus and ex...
- Publication number 20060256316
- Publication date Nov 16, 2006
- Zao Nikon Co., Ltd.
- Nobuyoshi Tanno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY