Nobuyuki Akiyama

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for producing thin film multilayer substrate, and method and...
- Patent number 5,278,012
- Issue date Jan 11, 1994
- Hitachi, Ltd.
- Chie Yamanaka
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting reticles and apparatus therefor
- Patent number 5,098,191
- Issue date Mar 24, 1992
- Hitachi, Ltd.
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for detecting foreign matter and device for realizing same
- Patent number 5,046,847
- Issue date Sep 10, 1991
- Hitachi Ltd.
- Toshihiko Nakata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for detecting foreign particle
- Patent number 4,965,454
- Issue date Oct 23, 1990
- Hitachi, Ltd.
- Toshihiko Yamauchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for position detection on reduction-projection...
- Patent number 4,938,598
- Issue date Jul 3, 1990
- Hitachi, Ltd.
- Nobuyuki Akiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of correcting defect in circuit pattern
- Patent number 4,925,755
- Issue date May 15, 1990
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate surface deflecting device
- Patent number 4,788,577
- Issue date Nov 29, 1988
- Hitachi, Ltd.
- Nobuyuki Akiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface flaw detection method
- Patent number 4,647,196
- Issue date Mar 3, 1987
- Hitachi Metals, Ltd.
- Asahiro Kuni
- G01 - MEASURING TESTING
Information Patent Grant
Automatic contaminants detection apparatus
- Patent number 4,614,427
- Issue date Sep 30, 1986
- Hitachi, Ltd.
- Mitsuyoshi Koizumi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for detecting contaminants on the reticle of exposure system
- Patent number 4,541,715
- Issue date Sep 17, 1985
- Hitachi, Ltd.
- Nobuyuki Akiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern detection system
- Patent number 4,508,453
- Issue date Apr 2, 1985
- Hitachi, Ltd.
- Yasuhiko Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer transforming device
- Patent number 4,504,045
- Issue date Mar 12, 1985
- Hitachi, Ltd.
- Yukio Kenbo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Flatness measuring device
- Patent number 4,491,787
- Issue date Jan 1, 1985
- Hitachi, Ltd.
- Nobuyuki Akiyama
- G01 - MEASURING TESTING
Information Patent Grant
Exposure process and system
- Patent number 4,475,223
- Issue date Oct 2, 1984
- Hitachi, Ltd.
- Motoya Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Test apparatus for defects of plate
- Patent number 4,460,273
- Issue date Jul 17, 1984
- Hitachi, Ltd.
- Mitsuyoshi Koizumi
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting microscopic surface defects
- Patent number 4,449,818
- Issue date May 22, 1984
- Hitachi Metals, Ltd.
- Kazuo Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Exterior view examination apparatus
- Patent number 4,447,731
- Issue date May 8, 1984
- Hitachi, Ltd.
- Asahiro Kuni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focusing position detecting device in optical magnifying and observ...
- Patent number 4,433,235
- Issue date Feb 21, 1984
- Hitachi, Ltd.
- Nobuyuki Akiyama
- G02 - OPTICS
Information Patent Grant
Method and apparatus for inspecting specimen surface
- Patent number 4,423,331
- Issue date Dec 27, 1983
- Hitachi, Ltd.
- Mitsuyoshi Koizumi
- G01 - MEASURING TESTING
Information Patent Grant
X-Ray exposure apparatus
- Patent number 4,403,336
- Issue date Sep 6, 1983
- Hitachi, Ltd.
- Motoya Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light exposure device and method
- Patent number 4,391,511
- Issue date Jul 5, 1983
- Hitachi, Ltd.
- Nobuyuki Akiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for projection type mask alignment
- Patent number 4,362,389
- Issue date Dec 7, 1982
- Hitachi, Ltd.
- Mituyoshi Koizumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Shape testing apparatus
- Patent number 4,343,553
- Issue date Aug 10, 1982
- Hitachi, Ltd.
- Yasuo Nakagawa
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for automatically checking external appearance of object
- Patent number 4,242,702
- Issue date Dec 30, 1980
- Hitachi, Ltd.
- Asahiro Kuni
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reduction-projection type mask alignment
- Patent number 4,153,371
- Issue date May 8, 1979
- Hitachi, Ltd.
- Mituyoshi Koizumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment pattern detecting apparatus
- Patent number 4,115,762
- Issue date Sep 19, 1978
- Hitachi, Ltd.
- Nobuyuki Akiyama
- G01 - MEASURING TESTING

Nobuyuki Akiyama

Person

Patents Grantslast 30 patents

Method for producing thin film multilayer substrate, and method and...

Method of inspecting reticles and apparatus therefor

Method for detecting foreign matter and device for realizing same

Method and apparatus for detecting foreign particle

Method and apparatus for position detection on reduction-projection...

Method of correcting defect in circuit pattern

Substrate surface deflecting device

Surface flaw detection method

Automatic contaminants detection apparatus

Apparatus for detecting contaminants on the reticle of exposure system

Pattern detection system

Wafer transforming device

Flatness measuring device

Exposure process and system

Test apparatus for defects of plate

Method of inspecting microscopic surface defects

Exterior view examination apparatus

Focusing position detecting device in optical magnifying and observ...

Method and apparatus for inspecting specimen surface

X-Ray exposure apparatus

Light exposure device and method

Method and apparatus for projection type mask alignment

Shape testing apparatus

Apparatus for automatically checking external appearance of object

Method and apparatus for reduction-projection type mask alignment

Alignment pattern detecting apparatus