Nobuyuki Hirota

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Iwate, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230422348
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Yasuaki KIKUCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESSING METHOD AND PROCESSING APPARATUS
- Publication number 20140290752
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Hiroyuki Matsuura
- H01 - BASIC ELECTRIC ELEMENTS