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Nobuyuki Iriki
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Kodaira, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Micropattern shape measuring system and method
Patent number
7,130,063
Issue date
Oct 31, 2006
Hitachi High-Technologies Corporation
Yasuhiro Mitsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micropattern shape measuring system and method
Patent number
6,894,790
Issue date
May 17, 2005
Hitachi High-Technologies Corporation
Yasuhiro Mitsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing and testing semiconductor integrated circui...
Patent number
6,716,648
Issue date
Apr 6, 2004
Renesas Technology Corp.
Nobuyuki Iriki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit device fabrication method and its...
Patent number
5,497,331
Issue date
Mar 5, 1996
Hitachi, Ltd.
Nobuyuki Iriki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making semiconductor integrated circuit, pattern detectin...
Patent number
5,432,608
Issue date
Jul 11, 1995
Hitachi, Ltd.
Susumu Komoriya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of making semiconductor integrated circuit, pattern detectin...
Patent number
5,260,771
Issue date
Nov 9, 1993
Hitachi, Ltd.
Susumu Komoriya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of making semiconductor integrated circuit, pattern detectin...
Patent number
5,094,539
Issue date
Mar 10, 1992
Hitachi, Ltd.
Susumu Komoriya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Micropattern shape measuring system and method
Publication number
20050182595
Publication date
Aug 18, 2005
Yasuhiro Mitsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Micropattern shape measuring system and method
Publication number
20030090684
Publication date
May 15, 2003
Yasuhiro Mitsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufacturing semiconductor integrated circuit device
Publication number
20020081758
Publication date
Jun 27, 2002
Nobuyuki Iriki
H01 - BASIC ELECTRIC ELEMENTS