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Nobuyuki Jinnai
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Kumamoto-shi, JP
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last 30 patents
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Patent Grant
Treatment apparatus and treatment method
Patent number
6,368,776
Issue date
Apr 9, 2002
Tokyo Electron Limited
Koji Harada
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Substrate-processing apparatus
Publication number
20020014084
Publication date
Feb 7, 2002
Masatoshi Kaneda
H01 - BASIC ELECTRIC ELEMENTS