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Nobuyuki Kohda
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Kanagawa, JP
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last 30 patents
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Patent Grant
Method for measuring liquid immersion lithography soluble fraction...
Patent number
7,924,400
Issue date
Apr 12, 2011
Tokyo Ohka Kogyo Co., Ltd.
Nobuyuki Kohda
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
METHOD FOR MEASURING LIQUID IMMERSION LITHOGRAPHY SOLUBLE FRACTION...
Publication number
20090268173
Publication date
Oct 29, 2009
Nobuyuki Kohda
G01 - MEASURING TESTING