Nobuyuki Mise

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Tsuchiura, JP

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Patents Grantslast 30 patents

Information Patent Grant
Process monitoring methods in a plasma processing apparatus, monito...
- Patent number 6,967,109
- Issue date Nov 22, 2005
- Hitachi, Ltd.
- Tatehito Usui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method of hardly-etched material and semiconductor fabricat...
- Patent number 6,835,665
- Issue date Dec 28, 2004
- Hitachi High-Technologies Corporation
- Nobuyuki Mise
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process monitoring methods in a plasma processing apparatus, monito...
- Patent number 6,759,253
- Issue date Jul 6, 2004
- Hitachi, Ltd.
- Tatehito Usui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion current density measuring method and instrument, and semiconduc...
- Patent number 6,656,752
- Issue date Dec 2, 2003
- Hitachi, Ltd.
- Nobuyuki Mise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer processing apparatus for transferring a wafer m...
- Patent number 6,462,411
- Issue date Oct 8, 2002
- Kokusai Electric Co., Ltd.
- Tomoji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 5,242,539
- Issue date Sep 7, 1993
- Hitachi, Ltd.
- Takao Kumihashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Process monitoring methods in a plasma processing apparatus, monito...
- Publication number 20060000800
- Publication date Jan 5, 2006
- Tatehito Usui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process monitoring methods in a plasma processing apparatus, monito...
- Publication number 20040235310
- Publication date Nov 25, 2004
- Tatehito Usui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion current density measuring method and instrument, and semiconduc...
- Publication number 20040092044
- Publication date May 13, 2004
- Nobuyuki Mise
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Etching method of hardly-etched material and semiconductor fabricat...
- Publication number 20030170998
- Publication date Sep 11, 2003
- Nobuyuki Mise
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process monitoring methods in a plasma processing apparatus, monito...
- Publication number 20010014520
- Publication date Aug 16, 2001
- Tatehito Usui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...