Nobuyuki Nagayama

Person

Nirasaki-shi Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Member for plasma processing apparatus and plasma processing appara...
- Patent number 11,548,827
- Issue date Jan 10, 2023
- Nippon Tungsten Co., Ltd.
- Takashi Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Member for plasma processing apparatus, plasma processing apparatus...
- Patent number 11,434,174
- Issue date Sep 6, 2022
- Nippon Tungsten Co., Ltd.
- Takashi Ikeda
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Particle collecting apparatus and particle collecting system
- Patent number 10,768,089
- Issue date Sep 8, 2020
- Tokyo Electron Limited
- Toshihiko Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal spray material and thermal spray coated article
- Patent number 10,766,822
- Issue date Sep 8, 2020
- Tokyo Electron Limited
- Nobuyuki Nagayama
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Plasma processing apparatus
- Patent number 10,622,196
- Issue date Apr 14, 2020
- Tokyo Electron Limited
- Nobuyuki Nagayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focus ring and plasma processing apparatus
- Patent number 10,566,175
- Issue date Feb 18, 2020
- Tokyo Electron Limited
- Nobuyuki Nagayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal spray material and thermal spray coated article
- Patent number 10,227,263
- Issue date Mar 12, 2019
- TOKYO ELECTRON LIMITED
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal spray material, thermal spray coating and thermal spray coa...
- Patent number 10,138,167
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Nobuyuki Nagayama
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Thermal spray material, thermal spray coating and thermal spray coa...
- Patent number 10,106,466
- Issue date Oct 23, 2018
- Tokyo Electron Limited
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal spray material, thermal spray coating and thermal spray coa...
- Patent number 10,106,879
- Issue date Oct 23, 2018
- Fujimi Incorporated
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and temperature control method
- Patent number 10,056,223
- Issue date Aug 21, 2018
- Tokyo Electron Limited
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode plate for plasma etching and plasma etching apparatus
- Patent number 9,818,583
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Naoyuki Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode plate for plasma etching and plasma etching apparatus
- Patent number 9,117,635
- Issue date Aug 25, 2015
- Tokyo Electron Limited
- Naoyuki Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control system and temperature control method for subst...
- Patent number 8,950,469
- Issue date Feb 10, 2015
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum exhaust method and a substrate processing apparatus therefor
- Patent number 8,945,313
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Hidefumi Matsui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method
- Patent number 8,896,210
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Masaru Nishino
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Internal member of a plasma processing vessel
- Patent number 8,877,002
- Issue date Nov 4, 2014
- Tokyo Electron Limited
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment container internal member, and plasma treatment ap...
- Patent number 8,739,732
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface processing method
- Patent number 8,715,782
- Issue date May 6, 2014
- Tokyo Electron Limited
- Naoyuki Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 8,545,672
- Issue date Oct 1, 2013
- Tokyo Electron Limited
- Nobuyuki Nagayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reusing a consumable part for use in a plasma processing...
- Patent number 8,475,622
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Internal member of a plasma processing vessel
- Patent number 8,449,715
- Issue date May 28, 2013
- Tokyo Electron Limited
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal spray powder, method for forming thermal spray coating, and...
- Patent number 8,349,450
- Issue date Jan 8, 2013
- Fujimi Incorporated
- Hiroyuki Ibe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface processing method
- Patent number 8,318,034
- Issue date Nov 27, 2012
- Tokyo Electron Limited
- Naoyuki Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of reusing a consumable part for use in a plasma processing...
- Patent number 8,221,579
- Issue date Jul 17, 2012
- Tokyo Electron Limited
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-chamber member, a cleaning method therefor and a plasma processi...
- Patent number 7,892,361
- Issue date Feb 22, 2011
- Tokyo Electron Limited
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Internal member of a plasma processing vessel
- Patent number 7,780,786
- Issue date Aug 24, 2010
- Tokyo Electron Limited
- Kouji Mitsuhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck
- Patent number 7,646,581
- Issue date Jan 12, 2010
- Sumitomo Osaka Cement Co., Ltd.
- Yasuharu Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing device and method of maintaining the device, mechanism a...
- Patent number 7,481,903
- Issue date Jan 27, 2009
- Tokyo Electron Limited
- Shigeru Senzaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal member for plasma-treating vessel and method of producing...
- Patent number 7,364,798
- Issue date Apr 29, 2008
- Tocalo Co., Ltd.
- Yoshio Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CONSUMABLE MEMBER, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUF...
- Publication number 20240128057
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Kazuki MOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230260757
- Publication date Aug 17, 2023
- TOKYO ELECTRON LIMITED
- Hideki SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, TRANSFER ARM, AND METHOD OF TRANSFERRING...
- Publication number 20220319800
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING PROCESSING APPARATUS, QUARTZ MEMBER AND PLASMA PROCESSING M...
- Publication number 20220020596
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Toshihiko KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANODIZED TITANIUM MATERIAL AND METHOD FOR PRODUCING THE SAME
- Publication number 20210207283
- Publication date Jul 8, 2021
- Yamaguchi Prefectural Industrial Technology Institute
- Takehiko MURANAKA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
MEMBER FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS...
- Publication number 20200317583
- Publication date Oct 8, 2020
- NIPPON TUNGSTEN CO., LTD.
- Takashi IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS...
- Publication number 20200317582
- Publication date Oct 8, 2020
- NIPPON TUNGSTEN CO., LTD.
- Takashi IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL SPRAY MATERIAL AND THERMAL SPRAY COATED ARTICLE
- Publication number 20190152863
- Publication date May 23, 2019
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180301313
- Publication date Oct 18, 2018
- TOKYO ELECTRON LIMITED
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FOCUS RING AND PLASMA PROCESSING APPARATUS
- Publication number 20180240651
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL SPRAY MATERIAL AND THERMAL SPRAY COATED ARTICLE
- Publication number 20180127318
- Publication date May 10, 2018
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
PARTICLE COLLECTING APPARATUS, PARTICLE COLLECTING METHOD, AND PART...
- Publication number 20180095021
- Publication date Apr 5, 2018
- TOKYO ELECTRON LIMITED
- Toshihiko KIKUCHI
- G01 - MEASURING TESTING
Information Patent Application
MANUFACTURING METHOD FOR COMPONENT IN PLASMA PROCESSING APPARATUS
- Publication number 20170233860
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL SPRAY MATERIAL, THERMAL SPRAY COATING AND THERMAL SPRAY COA...
- Publication number 20160326059
- Publication date Nov 10, 2016
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL SPRAY MATERIAL, THERMAL SPRAY COATING AND THERMAL SPRAY COA...
- Publication number 20160326058
- Publication date Nov 10, 2016
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL SPRAY MATERIAL, THERMAL SPRAY COATING AND THERMAL SPRAY COA...
- Publication number 20160326623
- Publication date Nov 10, 2016
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT FOR PLASMA PROCESSING APPARATUS, AND MANUFACTURING METHOD...
- Publication number 20160076129
- Publication date Mar 17, 2016
- TOKYO ELECTRON LIMITED
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE PLATE FOR PLASMA ETCHING AND PLASMA ETCHING APPARATUS
- Publication number 20150348762
- Publication date Dec 3, 2015
- TOKYO ELECTRON LIMITED
- Naoyuki SATOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150200080
- Publication date Jul 16, 2015
- TOKYO ELECTRON LIMITED
- Eiichiro KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING AND PLASMA PROCESSING APPARATUS
- Publication number 20150114567
- Publication date Apr 30, 2015
- Greene, Tweed Technologies, Inc.
- Nobuyuki NAGAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20150053348
- Publication date Feb 26, 2015
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND TEMPERATURE CONTROL METHOD
- Publication number 20140008020
- Publication date Jan 9, 2014
- Nobuyuki Nagayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONSUMABLE PART FOR USE IN A PLASMA PROCESSING APPARATUS
- Publication number 20130284375
- Publication date Oct 31, 2013
- Nobuyuki NAGAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL
- Publication number 20130255881
- Publication date Oct 3, 2013
- TOKYO ELECTRON LIMITED
- Kouji MITSUHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20130162142
- Publication date Jun 27, 2013
- TOCALO CO., LTD.
- Masaru NISHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM EXHAUST METHOD AND A SUBSTRATE PROCESSING APPARATUS THEREFOR
- Publication number 20130092185
- Publication date Apr 18, 2013
- TOKYO ELECTRON LIMITED
- Hidefumi MATSUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE PROCESSING METHOD
- Publication number 20130040055
- Publication date Feb 14, 2013
- TOKYO ELECTRON LIMITED
- Naoyuki SATOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF REUSING A CONSUMABLE PART FOR USE IN A PLASMA PROCESSING...
- Publication number 20120258258
- Publication date Oct 11, 2012
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20120160808
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Eiichiro KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120111500
- Publication date May 10, 2012
- TOKYO ELECTRON LIMITED
- Nobuyuki NAGAYAMA
- H01 - BASIC ELECTRIC ELEMENTS

Nobuyuki Nagayama

Person

Patents Grantslast 30 patents

Member for plasma processing apparatus and plasma processing appara...

Member for plasma processing apparatus, plasma processing apparatus...

Particle collecting apparatus and particle collecting system

Thermal spray material and thermal spray coated article

Plasma processing apparatus

Focus ring and plasma processing apparatus

Thermal spray material and thermal spray coated article

Thermal spray material, thermal spray coating and thermal spray coa...

Thermal spray material, thermal spray coating and thermal spray coa...

Thermal spray material, thermal spray coating and thermal spray coa...

Plasma processing apparatus and temperature control method

Electrode plate for plasma etching and plasma etching apparatus

Electrode plate for plasma etching and plasma etching apparatus

Temperature control system and temperature control method for subst...

Vacuum exhaust method and a substrate processing apparatus therefor

Plasma processing apparatus and method

Internal member of a plasma processing vessel

Plasma treatment container internal member, and plasma treatment ap...

Surface processing method

Plasma processing apparatus

Method of reusing a consumable part for use in a plasma processing...

Internal member of a plasma processing vessel

Thermal spray powder, method for forming thermal spray coating, and...

Surface processing method

Method of reusing a consumable part for use in a plasma processing...

In-chamber member, a cleaning method therefor and a plasma processi...

Internal member of a plasma processing vessel

Electrostatic chuck

Processing device and method of maintaining the device, mechanism a...

Internal member for plasma-treating vessel and method of producing...

Patents Applicationslast 30 patents

CONSUMABLE MEMBER, PLASMA PROCESSING APPARATUS, AND METHOD OF MANUF...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING SYSTEM, TRANSFER ARM, AND METHOD OF TRANSFERRING...

ETCHING PROCESSING APPARATUS, QUARTZ MEMBER AND PLASMA PROCESSING M...

ANODIZED TITANIUM MATERIAL AND METHOD FOR PRODUCING THE SAME

MEMBER FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS...

MEMBER FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS...

THERMAL SPRAY MATERIAL AND THERMAL SPRAY COATED ARTICLE

PLASMA PROCESSING APPARATUS

FOCUS RING AND PLASMA PROCESSING APPARATUS

THERMAL SPRAY MATERIAL AND THERMAL SPRAY COATED ARTICLE

PARTICLE COLLECTING APPARATUS, PARTICLE COLLECTING METHOD, AND PART...

MANUFACTURING METHOD FOR COMPONENT IN PLASMA PROCESSING APPARATUS

THERMAL SPRAY MATERIAL, THERMAL SPRAY COATING AND THERMAL SPRAY COA...

THERMAL SPRAY MATERIAL, THERMAL SPRAY COATING AND THERMAL SPRAY COA...

THERMAL SPRAY MATERIAL, THERMAL SPRAY COATING AND THERMAL SPRAY COA...

COMPONENT FOR PLASMA PROCESSING APPARATUS, AND MANUFACTURING METHOD...

ELECTRODE PLATE FOR PLASMA ETCHING AND PLASMA ETCHING APPARATUS

SUBSTRATE PROCESSING APPARATUS

FOCUS RING AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND TEMPERATURE CONTROL METHOD

CONSUMABLE PART FOR USE IN A PLASMA PROCESSING APPARATUS

INTERNAL MEMBER OF A PLASMA PROCESSING VESSEL

PLASMA PROCESSING APPARATUS AND METHOD

VACUUM EXHAUST METHOD AND A SUBSTRATE PROCESSING APPARATUS THEREFOR

SURFACE PROCESSING METHOD

METHOD OF REUSING A CONSUMABLE PART FOR USE IN A PLASMA PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PLASMA PROCESSING APPARATUS