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Nobuyuki Okayama

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  • Amagasaki-Shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Manufacturing method of sample table
    • Patent number 10,896,842
    • Issue date Jan 19, 2021
    • Tokyo Electron Limited
    • Wataru Yoshikawa
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Shower head, plasma processing apparatus and plasma processing method
    • Patent number 9,466,468
    • Issue date Oct 11, 2016
    • Tokyo Electron Limited
    • Nobuyuki Okayama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma etching apparatus and plasma etching method
    • Patent number 9,263,298
    • Issue date Feb 16, 2016
    • Tokyo Electron Limited
    • Naoki Matsumoto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Focus ring and plasma processing apparatus
    • Patent number 7,658,816
    • Issue date Feb 9, 2010
    • Tokyo Electron Limited
    • Akira Koshiishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate table, production method therefor and plasma treating device
    • Patent number 7,544,393
    • Issue date Jun 9, 2009
    • Tokyo Electron Limited
    • Shinji Muto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Processing system
    • Patent number RE40046
    • Issue date Feb 12, 2008
    • Tokyo Electron Limited
    • Nobuyuki Okayama
    • 029 - Metal working
  • Information Patent Grant

    Processing system
    • Patent number RE39969
    • Issue date Jan 1, 2008
    • Tokyo Electron Limited
    • Nobuyuki Okayama
    • 156 - Adhesive bonding and miscellaneous chemical manufacture
  • Information Patent Grant

    Processing system
    • Patent number RE39939
    • Issue date Dec 18, 2007
    • Tokyo Electron Limited
    • Nobuyuki Okayama
    • 156 - Adhesive bonding and miscellaneous chemical manufacture
  • Information Patent Grant

    Substrate table, production method therefor and plasma treating device
    • Patent number 7,067,178
    • Issue date Jun 27, 2006
    • Tokyo Electron Limited
    • Shinji Muto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process apparatus
    • Patent number 6,733,620
    • Issue date May 11, 2004
    • Tokyo Electron Limited
    • Norikazu Sugiyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing system
    • Patent number 6,334,983
    • Issue date Jan 1, 2002
    • Tokyo Electron Limited
    • Nobuyuki Okayama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma etching apparatus
    • Patent number 5,772,833
    • Issue date Jun 30, 1998
    • Tokyo Electron Limited
    • Koichiro Inazawa
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents