Nobuyuki Takada

Person

Fujisawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,733
- Issue date Jan 28, 2025
- Ebara Corporation
- Nobuyuki Takada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing head system and polishing apparatus
- Patent number 12,017,323
- Issue date Jun 25, 2024
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,911,872
- Issue date Feb 27, 2024
- Ebara Corporation
- Nobuyuki Takada
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,735,457
- Issue date Aug 22, 2023
- Ebara Corporation
- Nobuyuki Takada
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing system, substrate polishing method and substrat...
- Patent number 11,633,828
- Issue date Apr 25, 2023
- Ebara Corporation
- Yuta Suzuki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus
- Patent number 7,850,509
- Issue date Dec 14, 2010
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Electrolytic processing apparatus and electrolytic processing method
- Patent number 7,638,030
- Issue date Dec 29, 2009
- Ebara Corporation
- Osamu Nabeya
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Polishing apparatus
- Patent number 7,632,378
- Issue date Dec 15, 2009
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus
- Patent number 7,491,117
- Issue date Feb 17, 2009
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing machine
- Patent number 7,156,725
- Issue date Jan 2, 2007
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus
- Patent number 7,083,507
- Issue date Aug 1, 2006
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Dressing apparatus and polishing apparatus
- Patent number 6,899,604
- Issue date May 31, 2005
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,878,044
- Issue date Apr 12, 2005
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus
- Patent number 6,852,019
- Issue date Feb 8, 2005
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,682,408
- Issue date Jan 27, 2004
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Dressing apparatus and polishing apparatus
- Patent number 6,609,962
- Issue date Aug 26, 2003
- Ebara Corporation
- Satoshi Wakabayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Dressing apparatus
- Patent number 6,602,119
- Issue date Aug 5, 2003
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,558,226
- Issue date May 6, 2003
- Ebara Corporation
- Nobuyuki Takada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,447,385
- Issue date Sep 10, 2002
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,413,154
- Issue date Jul 2, 2002
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,379,229
- Issue date Apr 30, 2002
- Ebara Corporation
- Satoshi Wakabayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,358,128
- Issue date Mar 19, 2002
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,354,922
- Issue date Mar 12, 2002
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for polishing workpiece
- Patent number 6,354,918
- Issue date Mar 12, 2002
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,319,105
- Issue date Nov 20, 2001
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,312,312
- Issue date Nov 6, 2001
- Ebara Corporation
- Tetsuji Togawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Carrier device in polishing apparatus and method for controlling ca...
- Patent number 6,241,578
- Issue date Jun 5, 2001
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,042,455
- Issue date Mar 28, 2000
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING HEAD AND POLISHING SYSTEM
- Publication number 20240399526
- Publication date Dec 5, 2024
- EBARA CORPORATION
- Yuichi KATO
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE PROPERTY MEASURING APPARATUS FOR POLISHING PAD, SURFACE PRO...
- Publication number 20240075579
- Publication date Mar 7, 2024
- EBARA CORPORATION
- Kohei OHSHIMA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240051080
- Publication date Feb 15, 2024
- EBARA CORPORATION
- Kohei OTA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230060135
- Publication date Mar 2, 2023
- EBARA CORPORATION
- Nobuyuki TAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
- Publication number 20220305610
- Publication date Sep 29, 2022
- EBARA CORPORATION
- Takuya FUJIMOTO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD SYSTEM AND POLISHING APPARATUS
- Publication number 20210237224
- Publication date Aug 5, 2021
- EBARA CORPORATION
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210237221
- Publication date Aug 5, 2021
- EBARA CORPORATION
- Nobuyuki TAKADA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210193494
- Publication date Jun 24, 2021
- EBARA CORPORATION
- Nobuyuki TAKADA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING SYSTEM, SUBSTRATE POLISHING METHOD AND SUBSTRAT...
- Publication number 20200269380
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Yuta Suzuki
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHER AND POLISHING METHOD
- Publication number 20180236630
- Publication date Aug 23, 2018
- EBARA CORPORATION
- Hozumi YASUDA
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding apparatus
- Publication number 20090061748
- Publication date Mar 5, 2009
- Tetsuji TOGAWA
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding apparatus
- Publication number 20060234609
- Publication date Oct 19, 2006
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20050159082
- Publication date Jul 21, 2005
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding apparatus
- Publication number 20050118935
- Publication date Jun 2, 2005
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Substrate polishing machine
- Publication number 20040209560
- Publication date Oct 21, 2004
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus for manufacturing semiconductor device
- Publication number 20040198052
- Publication date Oct 7, 2004
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20040137823
- Publication date Jul 15, 2004
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Electrolytic processing apparatus and electrolytic processing method
- Publication number 20040129569
- Publication date Jul 8, 2004
- Osamu Nabeya
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Dressing apparatus and polishing apparatus
- Publication number 20030148707
- Publication date Aug 7, 2003
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20020045410
- Publication date Apr 18, 2002
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding apparatus
- Publication number 20020042246
- Publication date Apr 11, 2002
- Tetsuji Togawa
- B24 - GRINDING POLISHING

Nobuyuki Takada

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Polishing head system and polishing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate polishing system, substrate polishing method and substrat...

Substrate holding apparatus

Electrolytic processing apparatus and electrolytic processing method

Polishing apparatus

Substrate holding apparatus

Substrate polishing machine

Substrate holding apparatus

Dressing apparatus and polishing apparatus

Polishing apparatus

Substrate holding apparatus

Polishing apparatus

Dressing apparatus and polishing apparatus

Dressing apparatus

Polishing apparatus

Polishing apparatus

Polishing apparatus

Polishing apparatus

Polishing apparatus

Polishing apparatus

Apparatus and method for polishing workpiece

Polishing apparatus

Polishing apparatus

Carrier device in polishing apparatus and method for controlling ca...

Polishing apparatus

Patents Applicationslast 30 patents

POLISHING HEAD AND POLISHING SYSTEM

SURFACE PROPERTY MEASURING APPARATUS FOR POLISHING PAD, SURFACE PRO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

POLISHING HEAD SYSTEM AND POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE POLISHING SYSTEM, SUBSTRATE POLISHING METHOD AND SUBSTRAT...

SUBSTRATE POLISHER AND POLISHING METHOD

Substrate holding apparatus

Substrate holding apparatus

Polishing apparatus

Substrate holding apparatus

Substrate polishing machine

Apparatus for manufacturing semiconductor device

Polishing apparatus

Electrolytic processing apparatus and electrolytic processing method

Dressing apparatus and polishing apparatus

Polishing apparatus

Substrate holding apparatus