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Nobuyuki Takeyasu
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Chiba, JP
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last 30 patents
Information
Patent Grant
Method for making metal interconnection
Patent number
6,063,703
Issue date
May 16, 2000
Kawasaki Steel Corporation
Hiroshi Shinriki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device and an apparatus for m...
Patent number
6,001,736
Issue date
Dec 14, 1999
Kawasaki Steel Corporation
Eiichi Kondo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal interconnection and method for making
Patent number
5,973,402
Issue date
Oct 26, 1999
Kawasaki Steel Corporation
Hiroshi Shinriki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having a multilevel interconnection structure
Patent number
5,952,723
Issue date
Sep 14, 1999
Kawasaki Steel Corporation
Nobuyuki Takeyasu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multilevel interconnect method of manufacturing
Patent number
5,946,799
Issue date
Sep 7, 1999
Kawasaki Steel Corporation
Hiroshi Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device with contact structure
Patent number
5,652,180
Issue date
Jul 29, 1997
Kawasaki Steel Corporation
Hiroshi Shinriki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device having multilevel inte...
Patent number
5,637,534
Issue date
Jun 10, 1997
Kawasaki Steel Corporation
Nobuyuki Takeyasu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for making metal interconnection with chlorine plasma etch
Patent number
5,627,102
Issue date
May 6, 1997
Kawasaki Steel Corporation
Hiroshi Shinriki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multilevel interconnect structure
Patent number
5,627,345
Issue date
May 6, 1997
Kawasaki Steel Corporation
Hiroshi Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming multilayered wiring structure in semiconductor de...
Patent number
5,486,492
Issue date
Jan 23, 1996
Kawasaki Steel Corporation
Hiroshi Yamamoto
H01 - BASIC ELECTRIC ELEMENTS