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Suwon-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and driving method thereof
Patent number
11,984,345
Issue date
May 14, 2024
Samsung Electronics Co., Ltd.
Ilyoung Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and driving method thereof
Patent number
11,651,990
Issue date
May 16, 2023
Samsung Electronics Co., Ltd.
Ilyoung Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus including a beam shaper for s...
Patent number
11,462,410
Issue date
Oct 4, 2022
Samsung Electronics Co., Ltd.
Nohsung Kwak
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor manufacturing apparatus
Patent number
11,430,679
Issue date
Aug 30, 2022
Samsung Electronics Co., Ltd.
Kwangnam Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate bonding apparatus
Patent number
10,923,452
Issue date
Feb 16, 2021
Samsung Electronics Co., Ltd.
Ilyoung Han
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
COVER WAFER AND METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS I...
Publication number
20240203710
Publication date
Jun 20, 2024
Samsung Electonics Co., LTD.
Doyoung KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND DRIVING METHOD THEREOF
Publication number
20230253236
Publication date
Aug 10, 2023
Samsung Electronics Co., Ltd.
Ilyoung HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING A BEAM SHAPER FOR S...
Publication number
20210082704
Publication date
Mar 18, 2021
Samsung Electronics Co., Ltd.
Nohsung Kwak
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20210035830
Publication date
Feb 4, 2021
Samsung Electronics Co., Ltd.
Kwangnam KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND DRIVING METHOD THEREOF
Publication number
20210005504
Publication date
Jan 7, 2021
Samsung Electronics Co., Ltd.
Ilyoung HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE BONDING APPARATUS
Publication number
20200373274
Publication date
Nov 26, 2020
Samsung Electronics Co., Ltd.
Ilyoung HAN
H01 - BASIC ELECTRIC ELEMENTS