Norbert Benesch

Follow

Person

Nurnberg, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and device for optically monitoring fabrication processes of...
- Patent number 7,003,149
- Issue date Feb 21, 2006
- Semiconductor 300 GmbH & Co. KG
- Norbert Benesch
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for rapidly measuring angle-dependent diffraction effects...
- Patent number 6,724,475
- Issue date Apr 20, 2004
- Infineon Technologies AG
- Norbert Benesch
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for rapidly measuring angle-dependent diffraction effects...
- Publication number 20020101585
- Publication date Aug 1, 2002
- Norbert Benesch
- G01 - MEASURING TESTING
Information Patent Application
Method and device for optically monitoring fabrication processes of...
- Publication number 20020051564
- Publication date May 2, 2002
- Norbert Benesch
- G01 - MEASURING TESTING