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Norbert Bowering
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Bielefeld, DE
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Patents Grants
last 30 patents
Information
Patent Grant
EUV optical element having blister-resistant multilayer cap
Patent number
11,215,736
Issue date
Jan 4, 2022
ASML Netherlands B.V.
Norbert Bowering
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Harsh environment optical element protection
Patent number
10,185,234
Issue date
Jan 22, 2019
ASML Netherlands B.V.
Alexander I. Ershov
G02 - OPTICS
Information
Patent Grant
Drive laser for EUV light source
Patent number
9,735,535
Issue date
Aug 15, 2017
ASML Netherlands B.V.
Alexander I. Ershov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Target material supply apparatus for an extreme ultraviolet light s...
Patent number
9,632,418
Issue date
Apr 25, 2017
ASML Netherlands B.V.
Silvia De Dea
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Target material supply apparatus for an extreme ultraviolet light s...
Patent number
9,392,678
Issue date
Jul 12, 2016
ASML Netherlands B.V.
Silvia De Dea
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
EUV optics
Patent number
8,907,310
Issue date
Dec 9, 2014
ASML Netherlands B.V.
Norbert R. Bowering
G02 - OPTICS
Information
Patent Grant
EUV light source components and methods for producing, using and re...
Patent number
8,686,370
Issue date
Apr 1, 2014
Cymer, LLC
Norbert R. Bowering
B82 - NANO-TECHNOLOGY
Information
Patent Grant
EUV optics
Patent number
8,598,549
Issue date
Dec 3, 2013
Cymer, LLC
Norbert R. Bowering
G02 - OPTICS
Information
Patent Grant
Drive laser for EUV light source
Patent number
8,514,486
Issue date
Aug 20, 2013
Cymer LLC
Alexander I. Ershov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for heating an EUV collector mirror
Patent number
8,198,612
Issue date
Jun 12, 2012
Cymer, Inc.
Juan Armando Chavez
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser produced plasma EUV light source
Patent number
8,035,092
Issue date
Oct 11, 2011
Cymer, Inc.
Alexander N. Bykanov
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Systems and methods for target material delivery in a laser produce...
Patent number
7,872,245
Issue date
Jan 18, 2011
Cymer, Inc.
Georgiy O. Vaschenko
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
EUV OPTICAL ELEMENT HAVING BLISTER-RESISTANT MULTILAYER CAP
Publication number
20160349412
Publication date
Dec 1, 2016
Norbert BOWERING
G02 - OPTICS
Information
Patent Application
TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...
Publication number
20160274466
Publication date
Sep 22, 2016
ASML NETHERLANDS B.V.
Silvia De Dea
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV OPTICS
Publication number
20140176926
Publication date
Jun 26, 2014
Norbert R. BOWERING
G02 - OPTICS
Information
Patent Application
TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...
Publication number
20140102875
Publication date
Apr 17, 2014
Silvia De Dea
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HARSH ENVIRONMENT OPTICAL ELEMENT PROTECTION
Publication number
20140098413
Publication date
Apr 10, 2014
CYMER INC.
Alexander I. ERSHOV
G02 - OPTICS
Information
Patent Application
DRIVE LASER FOR EUV LIGHT SOURCE
Publication number
20130321901
Publication date
Dec 5, 2013
CYMER, LLC
Alexander I. Ershov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV Light Source Components and Methods for Producing, Using and Re...
Publication number
20130070332
Publication date
Mar 21, 2013
Cymer, Inc.
Norbert R. Bowering
B82 - NANO-TECHNOLOGY
Information
Patent Application
EUV Optics
Publication number
20110075253
Publication date
Mar 31, 2011
Cymer,Inc.
Norbert R. Bowering
G02 - OPTICS
Information
Patent Application
Drive laser for EUV light source
Publication number
20110058588
Publication date
Mar 10, 2011
Cymer, Inc.
Alexander I. Ershov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser produced plasma EUV light source
Publication number
20100127186
Publication date
May 27, 2010
Cymer, Inc.
Alexander N. Bykanov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser produced plasma euv light source
Publication number
20100024980
Publication date
Feb 4, 2010
Cymer, Inc.
Alexander I. Ershov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Systems and methods for heating an EUV collector mirror
Publication number
20100025600
Publication date
Feb 4, 2010
Cymer, Inc.
Juan Armando Chavez
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Systems and methods for target material delivery in a laser produce...
Publication number
20090230326
Publication date
Sep 17, 2009
Cymer, Inc.
Georgiy O. Vaschenko
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR