Norbert Bürger

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Kirchzarten, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for the treatment of objects, in particular fo...
- Patent number 8,088,227
- Issue date Jan 3, 2012
- RENA GmbH
- Norbert Bürger
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and Method for Cleaning of Objects, in Particular of Thin...
- Publication number 20080295860
- Publication date Dec 4, 2008
- Norbert Burger
- B08 - CLEANING
Information Patent Application
Device for cleaning wafers after a cmp process
- Publication number 20060219275
- Publication date Oct 5, 2006
- RENA Sondermaschinen GmbH
- Martin Weber
- H01 - BASIC ELECTRIC ELEMENTS