Norbert Muehlberger

Person

Aalen-Ebnat, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Facet mirror for use in a projection exposure apparatus for microli...
- Patent number 9,996,012
- Issue date Jun 12, 2018
- Carl Zeiss SMT GmbH
- Udo Dinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 9,513,562
- Issue date Dec 6, 2016
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for mounting an optical element
- Patent number 9,448,384
- Issue date Sep 20, 2016
- Carl Zeiss SMT GmbH
- Michael Erath
- G02 - OPTICS
Information Patent Grant
Facet mirror for use in a projection exposure apparatus for microli...
- Patent number 9,411,241
- Issue date Aug 9, 2016
- Carl Zeiss SMT GmbH
- Udo Dinger
- G02 - OPTICS
Information Patent Grant
Gravitation compensation for optical elements in projection exposur...
- Patent number 9,341,807
- Issue date May 17, 2016
- Carl Zeiss SMT GmbH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Grant
Actuator including magnet for a projection exposure system and proj...
- Patent number 9,025,128
- Issue date May 5, 2015
- Carl Zeiss SMT GmbH
- Armin Werber
- G02 - OPTICS
Information Patent Grant
Individual mirror for constructing a faceted mirror, in particular...
- Patent number 9,013,676
- Issue date Apr 21, 2015
- Carl Zeiss SMT GmbH
- Armin Werber
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 8,885,143
- Issue date Nov 11, 2014
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gravitation compensation for optical elements in projection exposur...
- Patent number 8,854,603
- Issue date Oct 7, 2014
- Carl Zeiss SMT GmbH
- Norbert Muehlberger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLI...
- Publication number 20160313646
- Publication date Oct 27, 2016
- Carl Zeiss SMT GMBH
- Udo Dinger
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20150015864
- Publication date Jan 15, 2015
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...
- Publication number 20150009557
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR MOUNTING AN OPTICAL ELEMENT
- Publication number 20130314681
- Publication date Nov 28, 2013
- Michael Erath
- G02 - OPTICS
Information Patent Application
ACTUATOR INCLUDING MAGNET FOR A PROJECTION EXPOSURE SYSTEM AND PROJ...
- Publication number 20120008121
- Publication date Jan 12, 2012
- Carl Zeiss SMT GMBH
- Armin Werber
- G02 - OPTICS
Information Patent Application
INDIVIDUAL MIRROR FOR CONSTRUCTING A FACETED MIRROR, IN PARTICULAR...
- Publication number 20110273694
- Publication date Nov 10, 2011
- Carl Zeiss SMT GMBH
- Armin Werber
- G02 - OPTICS
Information Patent Application
GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...
- Publication number 20110267596
- Publication date Nov 3, 2011
- Carl Zeiss SMT GMBH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20110235012
- Publication date Sep 29, 2011
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLI...
- Publication number 20110001947
- Publication date Jan 6, 2011
- Carl Zeiss SMT AG
- Udo Dinger
- G02 - OPTICS

Norbert Muehlberger

Person

Patents Grantslast 30 patents

Facet mirror for use in a projection exposure apparatus for microli...

Projection exposure apparatus for microlithography for the producti...

Arrangement for mounting an optical element

Facet mirror for use in a projection exposure apparatus for microli...

Gravitation compensation for optical elements in projection exposur...

Actuator including magnet for a projection exposure system and proj...

Individual mirror for constructing a faceted mirror, in particular...

Projection exposure apparatus for microlithography for the producti...

Gravitation compensation for optical elements in projection exposur...

Patents Applicationslast 30 patents

FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLI...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...

GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...

ARRANGEMENT FOR MOUNTING AN OPTICAL ELEMENT

ACTUATOR INCLUDING MAGNET FOR A PROJECTION EXPOSURE SYSTEM AND PROJ...

INDIVIDUAL MIRROR FOR CONSTRUCTING A FACETED MIRROR, IN PARTICULAR...

GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...

FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLI...