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Norbert Rosenkranz
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Reichenbach, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Mask inspection microscope with variable illumination setting
Patent number
8,970,951
Issue date
Mar 3, 2015
Carl Zeiss SMS GmbH
Ulrich Matejka
G02 - OPTICS
Information
Patent Grant
Microscope imaging system and method for emulating a high aperture...
Patent number
RE44216
Issue date
May 14, 2013
Carl Zeiss SMS GmbH
Michael Totzeck
359 - Optical: systems and elements
Information
Patent Grant
Method and apparatus for analyzing a group of photolithographic masks
Patent number
8,264,535
Issue date
Sep 11, 2012
Carl Zeiss SMS GmbH
Oliver Kienzle
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microscope imaging system and method for emulating a high aperture...
Patent number
7,286,284
Issue date
Oct 23, 2007
Carl Zeiss SMS GmbH
Michael Totzeck
G02 - OPTICS
Information
Patent Grant
Imaging system for an extreme ultraviolet (EUV) beam-based microscope
Patent number
6,894,837
Issue date
May 17, 2005
Carl Zeiss Microelectric Systems GmbH
Hans-Juergen Dobschal
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
MASK INSPECTION MICROSCOPE WITH VARIABLE ILLUMINATION SETTING
Publication number
20120162755
Publication date
Jun 28, 2012
CARL ZEISS SMS GMBH
Ulrich Stroessner
G02 - OPTICS
Information
Patent Application
METHOD AND APPARATUS FOR ANALYZING A GROUP OF PHOTOLITHOGRAPHIC MASKS
Publication number
20100157046
Publication date
Jun 24, 2010
Oliver Kienzle
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illuminating and imaging system comprising a diffractive beam splitter
Publication number
20070070502
Publication date
Mar 29, 2007
Robert Brunner
G02 - OPTICS
Information
Patent Application
Microscope imaging system and method for emulating a high aperture...
Publication number
20060012873
Publication date
Jan 19, 2006
Michael Totzeck
G02 - OPTICS
Information
Patent Application
Imaging system for an extreme ultraviolet (EUV) beam-based microscope
Publication number
20040212891
Publication date
Oct 28, 2004
Hans-Juergen Dobschal
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING