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Werneck, DE
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Patents Grants
last 30 patents
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Patent Grant
Projection exposure system for semiconductor lithography having an...
Patent number
11,415,894
Issue date
Aug 16, 2022
Carl Zeiss SMT GmbH
Judith Fingerhuth
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element having a coating for influencing heating radiation...
Patent number
11,112,543
Issue date
Sep 7, 2021
Carl Zeiss SMT GmbH
Boris Bittner
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Projection lens, projection exposure apparatus and projection expos...
Patent number
10,591,825
Issue date
Mar 17, 2020
Carl Zeiss SMT GmbH
Stephan Andre
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element and optical arrangement therewith
Patent number
10,474,036
Issue date
Nov 12, 2019
Carl Zeiss SMT GmbH
Hans-Jochen Paul
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element having a coating for influencing heating radiation...
Patent number
10,401,540
Issue date
Sep 3, 2019
Carl Zeiss SMT GmbH
Boris Bittner
G02 - OPTICS
Information
Patent Grant
Microlithographic projection exposure apparatus and measuring devic...
Patent number
10,345,710
Issue date
Jul 9, 2019
Carl Zeiss SMT GmbH
Albrecht Ehrmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus with at least one manipulator
Patent number
10,303,063
Issue date
May 28, 2019
Carl Zeiss SMT GmbH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus with a highly flexible manipulator
Patent number
10,261,425
Issue date
Apr 16, 2019
Carl Zeiss SMT GmbH
Alexander Wolf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection lens with wave front manipulator and related method and...
Patent number
10,061,206
Issue date
Aug 28, 2018
Carl Zeiss SMT GmbH
Boris Bittner
G02 - OPTICS
Information
Patent Grant
Projection lens, projection exposure apparatus and projection expos...
Patent number
10,048,592
Issue date
Aug 14, 2018
Carl Zeiss SMT GmbH
Stephan Andre
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of operating a microlithographic projection apparatus
Patent number
10,018,907
Issue date
Jul 10, 2018
Carl Zeiss SMT GmbH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection lens for EUV microlithography, film element and method f...
Patent number
10,001,631
Issue date
Jun 19, 2018
Carl Zeiss SMT GmbH
Boris Bittner
G02 - OPTICS
Information
Patent Grant
Projection objective for a microlithographic projection exposure ap...
Patent number
9,977,338
Issue date
May 22, 2018
Carl Zeiss SMT GmbH
Norbert Wabra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography projection objective, and a method for correcting image...
Patent number
9,964,859
Issue date
May 8, 2018
Carl Zeiss SMT GmbH
Ulrich Loering
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical assembly
Patent number
9,939,730
Issue date
Apr 10, 2018
Carl Zeiss SMT GmbH
Walter Pauls
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus including at least one mirror
Patent number
9,910,364
Issue date
Mar 6, 2018
Carl Zeiss SMT GmbH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus with at least one manipulator
Patent number
9,846,367
Issue date
Dec 19, 2017
Carl Zeiss SMT GmbH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System correction from long timescales
Patent number
9,829,800
Issue date
Nov 28, 2017
Carl Zeiss SMT GmbH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure method and projection exposure apparatus for mi...
Patent number
9,817,316
Issue date
Nov 14, 2017
Carl Zeiss SMT GmbH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mirror arrangement for an EUV projection exposure apparatus, method...
Patent number
9,709,770
Issue date
Jul 18, 2017
Carl Zeiss SMT GmbH
Boris Bittner
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflective optical element for EUV lithography and method of manufa...
Patent number
9,606,446
Issue date
Mar 28, 2017
Carl Zeiss SMT GmbH
Norbert Wabra
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Projection objective for a microlithographic projection exposure ap...
Patent number
9,588,445
Issue date
Mar 7, 2017
Carl Zeiss SMT GmbH
Norbert Wabra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflective optical element
Patent number
9,470,872
Issue date
Oct 18, 2016
Carl Zeiss SMT GmbH
Boris Bittner
G01 - MEASURING TESTING
Information
Patent Grant
Exposure apparatus and measuring device for a projection lens
Patent number
9,436,095
Issue date
Sep 6, 2016
Carl Zeiss SMT GmbH
Albrecht Ehrmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection objective of a microlithographic projection exposure app...
Patent number
9,372,411
Issue date
Jun 21, 2016
Carl Zeiss SMT GmbH
Johannes Zellner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microlithographic apparatus
Patent number
9,348,234
Issue date
May 24, 2016
Carl Zeiss SMT GmbH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography projection objective, and a method for correcting image...
Patent number
9,316,922
Issue date
Apr 19, 2016
Carl Zeiss SMT GmbH
Ulrich Loering
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection objective for a microlithographic projection exposure ap...
Patent number
9,280,058
Issue date
Mar 8, 2016
Carl Zeiss SMT GmbH
Norbert Wabra
G02 - OPTICS
Information
Patent Grant
Microlithographic projection exposure apparatus
Patent number
9,235,143
Issue date
Jan 12, 2016
Carl Zeiss SMT GmbH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus with at least one manipulator
Patent number
9,170,497
Issue date
Oct 27, 2015
Carl Zeiss SMT GmbH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL ELEMENT, OPTICAL SYSTEM, LITHOGRAPHY SYSTEM, AND METHOD FOR...
Publication number
20230138850
Publication date
May 4, 2023
Carl Zeiss SMT GMBH
Johannes Kimling
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT HAVING A COATING FOR INFLUENCING HEATING RADIATION...
Publication number
20210364677
Publication date
Nov 25, 2021
Carl Zeiss SMT GMBH
Boris Bittner
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
PROJECTION EXPOSURE SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY HAVING AN...
Publication number
20210349399
Publication date
Nov 11, 2021
Carl Zeiss SMT GMBH
Judith Fingerhuth
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT HAVING A COATING FOR INFLUENCING HEATING RADIATION...
Publication number
20190377107
Publication date
Dec 12, 2019
Carl Zeiss SMT GMBH
Boris Bittner
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
LITHOGRAPHY PROJECTION OBJECTIVE, AND A METHOD FOR CORRECTING IMAGE...
Publication number
20190072861
Publication date
Mar 7, 2019
Carl Zeiss SMT GMBH
Ulrich Loering
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE AP...
Publication number
20180373155
Publication date
Dec 27, 2018
Carl Zeiss SMT GMBH
Norbert Wabra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection Lens, Projection Exposure Apparatus and Projection Expos...
Publication number
20180364583
Publication date
Dec 20, 2018
Carl Zeiss SMT GMBH
Stephan Andre
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE APPARATUS WITH AT LEAST ONE MANIPULATOR
Publication number
20180173100
Publication date
Jun 21, 2018
Carl Zeiss SMT GMBH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...
Publication number
20180136565
Publication date
May 17, 2018
Carl Zeiss SMT GMBH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION LENS WITH WAVE FRONT MANIPULATOR AND RELATED METHOD AND...
Publication number
20180081281
Publication date
Mar 22, 2018
Carl Zeiss SMT GMBH
Boris Bittner
G02 - OPTICS
Information
Patent Application
Projection Lens for EUV Microlithography, Film Element and Method f...
Publication number
20170261730
Publication date
Sep 14, 2017
Carl Zeiss SMT GMBH
Boris Bittner
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE AP...
Publication number
20170227853
Publication date
Aug 10, 2017
Norbert Wabra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION LENS, PROJECTION EXPOSURE APPARATUS AND PROJECTION EXPOS...
Publication number
20170168399
Publication date
Jun 15, 2017
Carl Zeiss SMT GMBH
Stephan Andre
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT HAVING A COATING FOR INFLUENCING HEATING RADIATION...
Publication number
20170123118
Publication date
May 4, 2017
Carl Zeiss SMT GMBH
Boris Bittner
G02 - OPTICS
Information
Patent Application
PROJECTION EXPOSURE APPARATUS INCLUDING AT LEAST ONE MIRROR
Publication number
20170115576
Publication date
Apr 27, 2017
Carl Zeiss SMT GMBH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
Publication number
20170082930
Publication date
Mar 23, 2017
Carl Zeiss SMT GMBH
Albrecht Ehrmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT AND OPTICAL ARRANGEMENT THEREWITH
Publication number
20160377988
Publication date
Dec 29, 2016
Carl Zeiss SMT GMBH
Hans-Jochen PAUL
G02 - OPTICS
Information
Patent Application
LITHOGRAPHY PROJECTION OBJECTIVE, AND A METHOD FOR CORRECTING IMAGE...
Publication number
20160370709
Publication date
Dec 22, 2016
Carl Zeiss SMT GMBH
Ulrich Loering
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE AP...
Publication number
20160282729
Publication date
Sep 29, 2016
Carl Zeiss SMT GMBH
Norbert Wabra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...
Publication number
20160209754
Publication date
Jul 21, 2016
Carl Zeiss SMT GMBH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MIRROR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM AND METHO...
Publication number
20160161852
Publication date
Jun 9, 2016
Carl Zeiss SMT GMBH
Karl-Heinz SCHUSTER
G02 - OPTICS
Information
Patent Application
METHOD OF OPERATING A MICROLITHOGRAPHIC PROJECTION APPARATUS
Publication number
20160161845
Publication date
Jun 9, 2016
Carl Zeiss SMT GMBH
Boris Bittner
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OPTICAL ASSEMBLY
Publication number
20160091798
Publication date
Mar 31, 2016
Carl Zeiss SMT GMBH
Walter Pauls
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE APPARATUS WITH A HIGHLY FLEXIBLE MANIPULATOR
Publication number
20160054662
Publication date
Feb 25, 2016
Carl Zeiss SMT GMBH
Alexander Wolf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE APPARATUS WITH AT LEAST ONE MANIPULATOR
Publication number
20160033873
Publication date
Feb 4, 2016
Carl Zeiss SMT GMBH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MICROLITHOGRAPHIC APPARATUS
Publication number
20160011521
Publication date
Jan 14, 2016
Carl Zeiss SMT GMBH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reflective Optical Element for EUV Lithography and Method of Manufa...
Publication number
20150316851
Publication date
Nov 5, 2015
Carl Zeiss SMT GMBH
Norbert WABRA
G02 - OPTICS
Information
Patent Application
MIRROR ARRANGEMENT FOR AN EUV PROJECTION EXPOSURE APPARATUS, METHOD...
Publication number
20150168674
Publication date
Jun 18, 2015
Carl Zeiss SMT GMBH
Boris Bittner
G02 - OPTICS
Information
Patent Application
SYSTEM CORRECTION FROM LONG TIMESCALES
Publication number
20150160562
Publication date
Jun 11, 2015
Carl Zeiss SMT GMBH
Boris Bittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reflective Optical Element
Publication number
20150116703
Publication date
Apr 30, 2015
Carl Zeiss SMT GMBH
Boris Bittner
G02 - OPTICS