Norbertus Benedictus Koster

Person

's-Gravenhage, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Radiation sensor device for high energy photons
- Patent number 10,014,165
- Issue date Jul 3, 2018
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Diederik Jan Maas
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for reactive ion etching
- Patent number 9,761,458
- Issue date Sep 12, 2017
- Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
- Freddy Roozeboom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generator and method for cleaning an object
- Patent number 8,961,694
- Issue date Feb 24, 2015
- Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
- Fokko Pieter Wieringa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion gauge, a monitoring system and a method for determining a total...
- Patent number 8,749,245
- Issue date Jun 10, 2014
- Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO
- Norbertus Benedictus Koster
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and an apparatus for cleaning and/or sterilization of an obj...
- Patent number 8,480,807
- Issue date Jul 9, 2013
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderziek TNO
- Norbertus Benedictus Koster
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Lithographic apparatus comprising a magnet, method for the protecti...
- Patent number 8,446,560
- Issue date May 21, 2013
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas analyzing system, lithographic apparatus and method of improvin...
- Patent number 7,963,144
- Issue date Jun 21, 2011
- ASML Netherlands B.V.
- Norbertus Benedictus Koster
- G01 - MEASURING TESTING
Information Patent Grant
Optical arrangement and EUV lithography device with at least one he...
- Patent number 7,959,310
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Gas analyzing system, lithographic apparatus and method of improvin...
- Patent number 7,624,617
- Issue date Dec 1, 2009
- ASML Netherlands B.V.
- Norbertus Benedictus Koster
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic projection apparatus, device manufacturing method and...
- Patent number 7,115,886
- Issue date Oct 3, 2006
- ASML Netherlands B.V.
- Willem Van Schaik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic projection apparatus, device manufacturing method, and...
- Patent number 6,862,075
- Issue date Mar 1, 2005
- ASML Netherlands B.V.
- Norbertus Benedictus Koster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic projection apparatus, device manufacturing method and...
- Patent number 6,828,569
- Issue date Dec 7, 2004
- ASML Netherlands B.V.
- Willem Van Schaik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic projection apparatus, device manufacturing method, dev...
- Patent number 6,724,460
- Issue date Apr 20, 2004
- ASML Netherlands B.V.
- Willem Van Schaik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic projection apparatus, device manufacturing method, and...
- Patent number 6,614,505
- Issue date Sep 2, 2003
- ASML Netherlands B.V.
- Norbertus Benedictus Koster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
A RADIATION SENSOR DEVICE FOR HIGH ENERGY PHOTONS
- Publication number 20170092474
- Publication date Mar 30, 2017
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Diederik Jan Maas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE CLEANING DEVICE AND A METHOD OF CLEANING A SURFACE
- Publication number 20140373868
- Publication date Dec 25, 2014
- Norbertus Benedictus Koster
- B08 - CLEANING
Information Patent Application
METHOD OF MAKING A SUPPORT STRUCTURE
- Publication number 20130126226
- Publication date May 23, 2013
- Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO
- Norbertus Benedictus Koster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR REACTIVE ION ETCHING
- Publication number 20130118895
- Publication date May 16, 2013
- Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO
- Freddy Roozeboom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and an apparatus for cleaning and/or sterilization of an obj...
- Publication number 20110247649
- Publication date Oct 13, 2011
- Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO
- Norbertus Benedictus Koster
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
ION GAUGE, A MONITORING SYSTEM AND A METHOD FOR DETERMINING A TOTAL...
- Publication number 20110050242
- Publication date Mar 3, 2011
- Norbertus Benedictus Koster
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHIC APPARATUS COMPRISING A MAGNET, METHOD FOR THE PROTECTI...
- Publication number 20110013157
- Publication date Jan 20, 2011
- ASML NETHERLANDS B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for Contactless Cleaning, Lithographic Apparatus and Device...
- Publication number 20100151394
- Publication date Jun 17, 2010
- Luigi Scaccabarozzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA GENERATOR AND METHOD FOR CLEANING AN OBJECT
- Publication number 20100059085
- Publication date Mar 11, 2010
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETEN
- Fokko Pieter Wieringa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas Analyzing System, Lithographic Apparatus and Method of Improvin...
- Publication number 20100005854
- Publication date Jan 14, 2010
- ASML NETHERLANDS B.V.
- Norbertus Benedictus Koster
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL ARRANGEMENT AND EUV LITHOGRAPHY DEVICE WITH AT LEAST ONE HE...
- Publication number 20080143981
- Publication date Jun 19, 2008
- Carl Zeis SMT AG
- Dirk Heinrich EHM
- B82 - NANO-TECHNOLOGY
Information Patent Application
Gas analyzing system, lithographic apparatus and method of improvin...
- Publication number 20080128636
- Publication date Jun 5, 2008
- ASML NETHERLANDS B.V.
- Norbertus Benedictus Koster
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for the detection of a surface reaction, espec...
- Publication number 20070143032
- Publication date Jun 21, 2007
- Carl Zeiss SMT AG
- Fokko Pieter Wieringa
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Lithographic projection apparatus, device manufacturing method and...
- Publication number 20050112508
- Publication date May 26, 2005
- ASML NETHERLANDS B.V.
- Willem Van Schaik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic projection apparatus, device manufacturing method, and...
- Publication number 20040032574
- Publication date Feb 19, 2004
- ASML NETHERLANDS B.V.
- Norbertus Benedictus Koster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic projection apparatus, device manufacturing method and...
- Publication number 20030096193
- Publication date May 22, 2003
- Willem Van Schaik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic projection apparatus, device manufacturing method, dev...
- Publication number 20030095240
- Publication date May 22, 2003
- ASM LITHOGRAPHY B.V.
- Willem Van Schaik
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic projection apparatus, device manufacturing method, and...
- Publication number 20020154279
- Publication date Oct 24, 2002
- ASML NETHERLANDS B.V.
- Norbertus Benedictus Koster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Norbertus Benedictus Koster

Person

Patents Grantslast 30 patents

Radiation sensor device for high energy photons

Apparatus and method for reactive ion etching

Plasma generator and method for cleaning an object

Ion gauge, a monitoring system and a method for determining a total...

Method and an apparatus for cleaning and/or sterilization of an obj...

Lithographic apparatus comprising a magnet, method for the protecti...

Gas analyzing system, lithographic apparatus and method of improvin...

Optical arrangement and EUV lithography device with at least one he...

Gas analyzing system, lithographic apparatus and method of improvin...

Lithographic projection apparatus, device manufacturing method and...

Lithographic projection apparatus, device manufacturing method, and...

Lithographic projection apparatus, device manufacturing method and...

Lithographic projection apparatus, device manufacturing method, dev...

Lithographic projection apparatus, device manufacturing method, and...

Patents Applicationslast 30 patents

A RADIATION SENSOR DEVICE FOR HIGH ENERGY PHOTONS

SURFACE CLEANING DEVICE AND A METHOD OF CLEANING A SURFACE

METHOD OF MAKING A SUPPORT STRUCTURE

APPARATUS AND METHOD FOR REACTIVE ION ETCHING

Method and an apparatus for cleaning and/or sterilization of an obj...

ION GAUGE, A MONITORING SYSTEM AND A METHOD FOR DETERMINING A TOTAL...

LITHOGRAPHIC APPARATUS COMPRISING A MAGNET, METHOD FOR THE PROTECTI...

System for Contactless Cleaning, Lithographic Apparatus and Device...

PLASMA GENERATOR AND METHOD FOR CLEANING AN OBJECT

Gas Analyzing System, Lithographic Apparatus and Method of Improvin...

OPTICAL ARRANGEMENT AND EUV LITHOGRAPHY DEVICE WITH AT LEAST ONE HE...

Gas analyzing system, lithographic apparatus and method of improvin...

Apparatus and method for the detection of a surface reaction, espec...

Lithographic projection apparatus, device manufacturing method and...

Lithographic projection apparatus, device manufacturing method, and...

Lithographic projection apparatus, device manufacturing method and...

Lithographic projection apparatus, device manufacturing method, dev...

Lithographic projection apparatus, device manufacturing method, and...